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  1. 学術雑誌掲載済論文
  2. 和雑誌

Ion conducting properties of hydrogen-containing Ta2O5 thin films prepared by reactive sputtering

https://kitami-it.repo.nii.ac.jp/records/8468
250c1920-b720-47f1-8422-e82aaa974057
名前 / ファイル ライセンス アクション
No_5_Vaccum_83_528.pdf No_5_Vaccum_83_528.pdf (858.7 kB)
Item type 学術雑誌論文 / Journal Article(1)
公開日 2016-09-08
タイトル
言語 en
タイトル Ion conducting properties of hydrogen-containing Ta2O5 thin films prepared by reactive sputtering
言語
言語 eng
キーワード
主題Scheme Other
主題 Proton-conducting solid electrolyte thin film
キーワード
主題Scheme Other
主題 Tantalum oxide
キーワード
主題Scheme Other
主題 Reactive sputtering
キーワード
主題Scheme Other
主題 Ionic conductivity
資源タイプ
資源 http://purl.org/coar/resource_type/c_6501
タイプ journal article
アクセス権
アクセス権 open access
アクセス権URI http://purl.org/coar/access_right/c_abf2
著者 Abe, Yoshio

× Abe, Yoshio

WEKO 44643

en Abe, Yoshio

Search repository
Itadani, Naruhiro

× Itadani, Naruhiro

WEKO 44644

en Itadani, Naruhiro

Search repository
Kawamura, Midori

× Kawamura, Midori

WEKO 44645

en Kawamura, Midori

Search repository
Sasaki, Katsutaka

× Sasaki, Katsutaka

WEKO 44646

en Sasaki, Katsutaka

Search repository
Itoh, Hidenobu

× Itoh, Hidenobu

WEKO 44647

en Itoh, Hidenobu

Search repository
著者別名
姓名
姓名 阿部, 良夫
言語 ja
著者別名
姓名
姓名 川村, みどり
言語 ja
抄録
内容記述タイプ Abstract
内容記述 Hydrogen-containing Ta2O5 (Ta2O5:H) thin films are considered to be a candidate for a proton-conducting solid-oxide electrolyte. In this study, Ta2O5:H thin films were prepared by reactively sputtering a Ta metal target in an O2 + H2O mixed gas. The effects of sputtering power and post-deposition heat treatment on the ion conducting properties of the Ta2O5:H thin films were studied. The ionic conductivity of the films was improved by decreasing the RF power and a maximum conductivity of 2 × 10?9 S/cm was obtained at an RF power of 20 W. The ionic conductivity decreased by heat-treatment in air, and no ion-conduction was observed after treatment at 300 °C due to the decrease in hydrogen content in the films.
書誌情報 Vacuum

巻 83, 号 3, p. 528-530, 発行日 2008
DOI
関連識別子
識別子タイプ DOI
関連識別子 https://doi.org/10.1016/j.vacuum.2008.04.018
権利
権利情報 c 2008 Elsevier
出版者
出版者 Elsevier
著者版フラグ
値 author
出版タイプ
出版タイプ AM
出版タイプResource http://purl.org/coar/version/c_ab4af688f83e57aa
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