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Time-dependent variation of the target mode in reactive sputtering of Al-O_2 system
https://kitami-it.repo.nii.ac.jp/records/7615
https://kitami-it.repo.nii.ac.jp/records/7615992fe7af-052d-4f94-8149-863f1c194079
名前 / ファイル | ライセンス | アクション |
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Item type | 学術雑誌論文 / Journal Article(1) | |||||
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公開日 | 2014-02-25 | |||||
タイトル | ||||||
言語 | en | |||||
タイトル | Time-dependent variation of the target mode in reactive sputtering of Al-O_2 system | |||||
言語 | ||||||
言語 | eng | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | gettering effect | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | target voltage | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | chamber pressure | |||||
資源タイプ | ||||||
資源 | http://purl.org/coar/resource_type/c_6501 | |||||
タイプ | journal article | |||||
アクセス権 | ||||||
アクセス権 | open access | |||||
アクセス権URI | http://purl.org/coar/access_right/c_abf2 | |||||
著者 |
Abe, Yoshio
× Abe, Yoshio× Shinya, Koji× Chiba, Youjiro× Kawamura, Midori× Sasaki, Katsutaka |
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抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | Reactive sputtering techniques have been widely used for forming compound thin films. In this study, the time-dependent variation of the target mode of an Al-O_2 system was investigated by measuring the target voltage for various reactive O_2 gas flow ratios and presputtering (i.e., sputtering in pure Ar gas to clean the target surface) times. The Al target remains in metallic mode for a certain period of time after being exposed to an Ar-O_2 plasma before it begins to be oxidized. This period increases with decreasing O_2 flow ratio and with increasing the presputtering time. It is considered that the period is caused by the gettering of O_2 gas by Al films deposited on the substrate and the chamber wall during presputtering. | |||||
抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | target surface state | |||||
書誌情報 |
Vacuum 巻 84, 号 12, p. 1365-1367, 発行日 2010-06 |
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出版者 | ||||||
出版者 | Elsevier | |||||
著者版フラグ | ||||||
値 | author | |||||
出版タイプ | ||||||
出版タイプ | AM | |||||
出版タイプResource | http://purl.org/coar/version/c_ab4af688f83e57aa |