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Transmission electron microscopic observation of nanoindentations made on ductile-machined silicon wafers
https://kitami-it.repo.nii.ac.jp/records/6970
https://kitami-it.repo.nii.ac.jp/records/6970e5733aa4-4c37-43a4-be61-980e80b2cb5c
名前 / ファイル | ライセンス | アクション |
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Item type | 学術雑誌論文 / Journal Article(1) | |||||
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公開日 | 2007-05-08 | |||||
タイトル | ||||||
言語 | en | |||||
タイトル | Transmission electron microscopic observation of nanoindentations made on ductile-machined silicon wafers | |||||
言語 | ||||||
言語 | eng | |||||
資源タイプ | ||||||
資源 | http://purl.org/coar/resource_type/c_6501 | |||||
タイプ | journal article | |||||
アクセス権 | ||||||
アクセス権 | open access | |||||
アクセス権URI | http://purl.org/coar/access_right/c_abf2 | |||||
著者 |
Yan, Jiwang
× Yan, Jiwang× Takahashi, Hirokazu× Tamaki, Jun-ichi× Gai, Xiaohui× Kuriyagawa, Tsunemoto |
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抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | Nanoindentation tests were performed on a ductile-machined silicon wafer with a Berkovich diamond indenter, and the resulting indents were examined with a transmission electron microscope. It was found that the machining-induced subsurface amorphous layer undergoes significant plastic flow, and the microstructure of the indent depends on the indentation load. At a small load (~20 mN),most of the indented region remains to be amorphous with minor crystalline nuclei; while under a large load (~50 mN),the amorphous phase undergoes intensive recrystallization. The understanding and utilization of this phenomenon might be useful for improving the microscopic surface properties of silicon parts produced by a ductile machining process. | |||||
書誌情報 |
Applied physics letters 巻 87, p. 211901-1-211901-3, 発行日 2005-11 |
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DOI | ||||||
識別子タイプ | DOI | |||||
関連識別子 | http://doi.org/10.1063/1.2133908 | |||||
権利 | ||||||
権利情報 | The following article appeared in C.C. Hsu, J.H. Lin, T.H. Huang, K. Harada, Applied Physics Letters, 87, 211901-1-211901-3, (2005) and may be found at http://link.aip.org/link/?apl/87/211901-1. | |||||
権利 | ||||||
権利情報 | Copyright 2005 American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics. | |||||
出版者 | ||||||
出版者 | American Institute of Physics | |||||
著者版フラグ | ||||||
値 | publisher | |||||
出版タイプ | ||||||
出版タイプ | VoR | |||||
出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 |