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  1. 学術雑誌掲載済論文
  2. 洋雑誌

Transmission electron microscopic observation of nanoindentations made on ductile-machined silicon wafers

https://kitami-it.repo.nii.ac.jp/records/6970
https://kitami-it.repo.nii.ac.jp/records/6970
e5733aa4-4c37-43a4-be61-980e80b2cb5c
名前 / ファイル ライセンス アクション
4102.pdf 4102.pdf (4.1 MB)
Item type 学術雑誌論文 / Journal Article(1)
公開日 2007-05-08
タイトル
言語 en
タイトル Transmission electron microscopic observation of nanoindentations made on ductile-machined silicon wafers
言語
言語 eng
資源タイプ
資源 http://purl.org/coar/resource_type/c_6501
タイプ journal article
アクセス権
アクセス権 open access
アクセス権URI http://purl.org/coar/access_right/c_abf2
著者 Yan, Jiwang

× Yan, Jiwang

WEKO 35204

en Yan, Jiwang

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Takahashi, Hirokazu

× Takahashi, Hirokazu

WEKO 35205

en Takahashi, Hirokazu

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Tamaki, Jun-ichi

× Tamaki, Jun-ichi

WEKO 35206

en Tamaki, Jun-ichi

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Gai, Xiaohui

× Gai, Xiaohui

WEKO 35207

en Gai, Xiaohui

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Kuriyagawa, Tsunemoto

× Kuriyagawa, Tsunemoto

WEKO 35208

en Kuriyagawa, Tsunemoto

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抄録
内容記述タイプ Abstract
内容記述 Nanoindentation tests were performed on a ductile-machined silicon wafer with a Berkovich diamond indenter, and the resulting indents were examined with a transmission electron microscope. It was found that the machining-induced subsurface amorphous layer undergoes significant plastic flow, and the microstructure of the indent depends on the indentation load. At a small load (~20 mN),most of the indented region remains to be amorphous with minor crystalline nuclei; while under a large load (~50 mN),the amorphous phase undergoes intensive recrystallization. The understanding and utilization of this phenomenon might be useful for improving the microscopic surface properties of silicon parts produced by a ductile machining process.
書誌情報 Applied physics letters

巻 87, p. 211901-1-211901-3, 発行日 2005-11
DOI
識別子タイプ DOI
関連識別子 http://doi.org/10.1063/1.2133908
権利
権利情報 The following article appeared in C.C. Hsu, J.H. Lin, T.H. Huang, K. Harada, Applied Physics Letters, 87, 211901-1-211901-3, (2005) and may be found at http://link.aip.org/link/?apl/87/211901-1.
権利
権利情報 Copyright 2005 American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics.
出版者
出版者 American Institute of Physics
著者版フラグ
値 publisher
出版タイプ
出版タイプ VoR
出版タイプResource http://purl.org/coar/version/c_970fb48d4fbd8a85
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