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Effect of Heat Treatment on Ion Conductivity of Hydrated ZrO2 Thin Films Prepared by Reactive Sputtering Using H2O Gas
https://kitami-it.repo.nii.ac.jp/records/8474
https://kitami-it.repo.nii.ac.jp/records/847451a8c0cf-b28a-42f0-95b1-5512f55e14ea
| 名前 / ファイル | ライセンス | アクション |
|---|---|---|
No_39_JJAP_50_045804.pdf (1.9 MB)
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| Item type | 学術雑誌論文 / Journal Article(1) | |||||||||||||||||
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| 公開日 | 2016-09-08 | |||||||||||||||||
| タイトル | ||||||||||||||||||
| タイトル | Effect of Heat Treatment on Ion Conductivity of Hydrated ZrO2 Thin Films Prepared by Reactive Sputtering Using H2O Gas | |||||||||||||||||
| 言語 | en | |||||||||||||||||
| 言語 | ||||||||||||||||||
| 言語 | eng | |||||||||||||||||
| 資源タイプ | ||||||||||||||||||
| 資源 | http://purl.org/coar/resource_type/c_6501 | |||||||||||||||||
| タイプ | journal article | |||||||||||||||||
| アクセス権 | ||||||||||||||||||
| アクセス権 | open access | |||||||||||||||||
| アクセス権URI | http://purl.org/coar/access_right/c_abf2 | |||||||||||||||||
| 著者 |
Li, Ning
× Li, Ning
× Abe, Yoshio
× Kawamura, Midori
× Sasaki, Katsutaka
× Itoh, Hidenobu
× Suzuki, Tsutomu
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| 著者別名 | ||||||||||||||||||
| 識別子Scheme | WEKO | |||||||||||||||||
| 識別子 | 44879 | |||||||||||||||||
| 識別子Scheme | KAKEN | |||||||||||||||||
| 識別子URI | https://nrid.nii.ac.jp/ja/nrid/1000020261399 | |||||||||||||||||
| 識別子 | 20261399 | |||||||||||||||||
| 姓名 | 阿部, 良夫 | |||||||||||||||||
| 言語 | ja | |||||||||||||||||
| 著者別名 | ||||||||||||||||||
| 識別子Scheme | WEKO | |||||||||||||||||
| 識別子 | 44880 | |||||||||||||||||
| 識別子Scheme | KAKEN | |||||||||||||||||
| 識別子URI | https://nrid.nii.ac.jp/ja/nrid/1000070261401 | |||||||||||||||||
| 識別子 | 70261401 | |||||||||||||||||
| 姓名 | 川村, みどり | |||||||||||||||||
| 言語 | ja | |||||||||||||||||
| 抄録 | ||||||||||||||||||
| 内容記述タイプ | Abstract | |||||||||||||||||
| 内容記述 | Hydrated ZrO2 thin films were prepared by reactive sputtering using H2O gas, and these films were heat treated in air at temperatures from 100 to 350 °C. Absorbance peaks due to hydrogen-bonded OH groups for these samples were observed by Fourier transform infrared spectroscopy. The peak intensities were nearly the same before and after heat treatment below 200 °C, but began to decrease at 250 °C, and the absorption peak disappeared at 350 °C. Ion conductivity of the films was evaluated by AC impedance measurements and was found to be about 3 ×10-6 S/m before and after heat treatment at 200 °C; it also decreased after heat treatment above 250 °C. From these results, we considered that protons of OH and/or H2O in the films are the dominant ionic species that contribute to the ion conductivity of the films. | |||||||||||||||||
| 書誌情報 |
Japanese Journal of Applied Physics 巻 50, 号 4R, p. 045804, 発行日 2011 |
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| 権利 | ||||||||||||||||||
| 権利情報 | c 2011 The Japan Society of Applied Physics | |||||||||||||||||
| 出版者 | ||||||||||||||||||
| 出版者 | The Japan Society of Applied Physics | |||||||||||||||||
| 著者版フラグ | ||||||||||||||||||
| 言語 | en | |||||||||||||||||
| 値 | author | |||||||||||||||||
| 出版タイプ | ||||||||||||||||||
| 出版タイプ | AM | |||||||||||||||||
| 出版タイプResource | http://purl.org/coar/version/c_ab4af688f83e57aa | |||||||||||||||||
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Cite as
Li, Ning, Abe, Yoshio, Kawamura, Midori, Sasaki, Katsutaka, Itoh, Hidenobu, Suzuki, Tsutomu, 2011, Effect of Heat Treatment on Ion Conductivity of Hydrated ZrO2 Thin Films Prepared by Reactive Sputtering Using H2O Gas: The Japan Society of Applied Physics, 045804– p.
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