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Effect of Heat Treatment on Ion Conductivity of Hydrated ZrO2 Thin Films Prepared by Reactive Sputtering Using H2O Gas
https://kitami-it.repo.nii.ac.jp/records/8474
https://kitami-it.repo.nii.ac.jp/records/847451a8c0cf-b28a-42f0-95b1-5512f55e14ea
名前 / ファイル | ライセンス | アクション |
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No_39_JJAP_50_045804.pdf (1.9 MB)
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Item type | 学術雑誌論文 / Journal Article(1) | |||||
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公開日 | 2016-09-08 | |||||
タイトル | ||||||
言語 | en | |||||
タイトル | Effect of Heat Treatment on Ion Conductivity of Hydrated ZrO2 Thin Films Prepared by Reactive Sputtering Using H2O Gas | |||||
言語 | ||||||
言語 | eng | |||||
資源タイプ | ||||||
資源 | http://purl.org/coar/resource_type/c_6501 | |||||
タイプ | journal article | |||||
アクセス権 | ||||||
アクセス権 | open access | |||||
アクセス権URI | http://purl.org/coar/access_right/c_abf2 | |||||
著者 |
Li, Ning
× Li, Ning× Abe, Yoshio× Kawamura, Midori× Sasaki, Katsutaka× Itoh, Hidenobu× Suzuki, Tsutomu |
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著者別名 | ||||||
姓名 | 阿部, 良夫 | |||||
言語 | ja | |||||
著者別名 | ||||||
姓名 | 川村, みどり | |||||
言語 | ja | |||||
抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | Hydrated ZrO2 thin films were prepared by reactive sputtering using H2O gas, and these films were heat treated in air at temperatures from 100 to 350 °C. Absorbance peaks due to hydrogen-bonded OH groups for these samples were observed by Fourier transform infrared spectroscopy. The peak intensities were nearly the same before and after heat treatment below 200 °C, but began to decrease at 250 °C, and the absorption peak disappeared at 350 °C. Ion conductivity of the films was evaluated by AC impedance measurements and was found to be about 3 ×10-6 S/m before and after heat treatment at 200 °C; it also decreased after heat treatment above 250 °C. From these results, we considered that protons of OH and/or H2O in the films are the dominant ionic species that contribute to the ion conductivity of the films. | |||||
書誌情報 |
Japanese Journal of Applied Physics 巻 50, 号 4R, p. 045804, 発行日 2011 |
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権利 | ||||||
権利情報 | c 2011 The Japan Society of Applied Physics | |||||
出版者 | ||||||
出版者 | The Japan Society of Applied Physics | |||||
著者版フラグ | ||||||
値 | author | |||||
出版タイプ | ||||||
出版タイプ | AM | |||||
出版タイプResource | http://purl.org/coar/version/c_ab4af688f83e57aa |