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  1. 学術雑誌掲載済論文
  2. 洋雑誌

Target-Surface Compound Layers Formed by Reactive Sputtering of Si Target in Ar+O2 and Ar+N2 Mixed Gases

https://kitami-it.repo.nii.ac.jp/records/8472
86f76898-cfa2-4fe7-b04c-e43c5fa7b9ae
名前 / ファイル ライセンス アクション
No_28_JJAP_46_6778.pdf No_28_JJAP_46_6778.pdf (250.5 kB)
Item type 学術雑誌論文 / Journal Article(1)
公開日 2016-09-08
タイトル
言語 en
タイトル Target-Surface Compound Layers Formed by Reactive Sputtering of Si Target in Ar+O2 and Ar+N2 Mixed Gases
言語
言語 eng
キーワード
主題Scheme Other
主題 reactive sputtering
キーワード
主題Scheme Other
主題 Si model target
キーワード
主題Scheme Other
主題 plasma oxidation and nitridation
キーワード
主題Scheme Other
主題 ellipsometry
キーワード
主題Scheme Other
主題 target surface state
資源タイプ
資源 http://purl.org/coar/resource_type/c_6501
タイプ journal article
アクセス権
アクセス権 open access
アクセス権URI http://purl.org/coar/access_right/c_abf2
著者 Abe, Yoshio

× Abe, Yoshio

WEKO 44672

en Abe, Yoshio

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Takisawa, Takaya

× Takisawa, Takaya

WEKO 44673

en Takisawa, Takaya

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Kawamura, Midori

× Kawamura, Midori

WEKO 44674

en Kawamura, Midori

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Sasaki, Katsutaka

× Sasaki, Katsutaka

WEKO 44675

en Sasaki, Katsutaka

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著者別名
姓名
姓名 阿部, 良夫
言語 ja
著者別名
姓名
姓名 川村, みどり
言語 ja
抄録
内容記述タイプ Abstract
内容記述 Reactive sputtering is a very useful and widely used technique for preparing compound thin films, however, the target surface state is not fully understood. In this study, a Si wafer was used as a model sputtering target, and the thickness of the oxide and nitride layers formed on the target surface after sputtering in Ar+O2 and Ar+N2 mixed gases, respectively, was measured by ellipsometry. The maximum thicknesses of oxide and nitride layers were found to be approximately 7 nm in pure O2 gas and 4 nm in pure N2 gas, respectively. The oxidation rate of Si in oxygen plasma was thought to be higher than the nitridation rate of Si in nitrogen plasma.
書誌情報 Japanese Journal of Applied Physics

巻 46, 号 10A, p. 6778-6781, 発行日 2007
権利
権利情報 c 2007 The Japan Society of Applied Physics
出版者
出版者 The Japan Society of Applied Physics
著者版フラグ
値 author
出版タイプ
出版タイプ AM
出版タイプResource http://purl.org/coar/version/c_ab4af688f83e57aa
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