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  1. 学術雑誌掲載済論文
  2. 洋雑誌

Simulation of Dislocation Accumulation in ULSI Cells of Reduced Gate Length

https://kitami-it.repo.nii.ac.jp/records/7524
https://kitami-it.repo.nii.ac.jp/records/7524
c205d932-d7c8-4804-acf0-f0fc09825da9
名前 / ファイル ライセンス アクション
pricm7_m_sato.pdf pricm7_m_sato.pdf (389.3 kB)
Item type 学術雑誌論文 / Journal Article(1)
公開日 2012-06-12
タイトル
言語 en
タイトル Simulation of Dislocation Accumulation in ULSI Cells of Reduced Gate Length
言語
言語 eng
キーワード
主題Scheme Other
主題 ULSI
キーワード
主題Scheme Other
主題 Dislocation
キーワード
主題Scheme Other
主題 Crystal plasticity analysis
キーワード
主題Scheme Other
主題 Finite element method
資源タイプ
資源 http://purl.org/coar/resource_type/c_6501
タイプ journal article
アクセス権
アクセス権 open access
アクセス権URI http://purl.org/coar/access_right/c_abf2
著者 Sato, Michihiro

× Sato, Michihiro

WEKO 38535

en Sato, Michihiro

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Ohashi, Tetsuya

× Ohashi, Tetsuya

WEKO 38536

en Ohashi, Tetsuya

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Aikawa, Keisuke

× Aikawa, Keisuke

WEKO 38537

en Aikawa, Keisuke

Search repository
Maruizumi, Takuya

× Maruizumi, Takuya

WEKO 38538

en Maruizumi, Takuya

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Kitagawa, Isao

× Kitagawa, Isao

WEKO 38539

en Kitagawa, Isao

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抄録
内容記述タイプ Abstract
内容記述 We numerically evaluate the accumulation of dislocations in periodic structure of the
shallow trench isolation (STI) type ULSI cells which has generally been adopted as the latest
semiconductor device structure. STI type ULSI cells with gate length less than 62 nm and various
trench depths are employed and subjected to a temperature drop from the initial value of 1000 ℃.
Dislocation accumulation is evaluated by a technique of crystal plasticity analysis. Relations between
the geometry of the STI type ULSI cells and dislocation accumulation are discussed.
内容記述
内容記述タイプ Other
内容記述 c (2010) Trans Tech Publications
書誌情報 Materials Science Forum

巻 654-656, 号 PRICM7, p. 1682-1685, 発行日 2010-06
DOI
識別子タイプ DOI
関連識別子 http://doi.org/10.4028/www.scientific.net/MSF.654-656.1682
出版者
出版者 Trans Tech Publications
著者版フラグ
値 author
出版タイプ
出版タイプ AM
出版タイプResource http://purl.org/coar/version/c_ab4af688f83e57aa
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