{"_buckets": {"deposit": "0adabb62-1a86-49d4-808f-4e9e3886fc8e"}, "_deposit": {"id": "7518", "owners": [], "pid": {"revision_id": 0, "type": "depid", "value": "7518"}, "status": "published"}, "_oai": {"id": "oai:kitami-it.repo.nii.ac.jp:00007518", "sets": ["1:86"]}, "author_link": ["38506", "38507", "38508", "38509", "44817", "44811", "38504", "38505"], "item_1646810750418": {"attribute_name": "\u51fa\u7248\u30bf\u30a4\u30d7", "attribute_value_mlt": [{"subitem_version_resource": "http://purl.org/coar/version/c_970fb48d4fbd8a85", "subitem_version_type": "VoR"}]}, "item_3_alternative_title_198": {"attribute_name": "\u305d\u306e\u4ed6\u306e\u30bf\u30a4\u30c8\u30eb", "attribute_value_mlt": [{"subitem_alternative_title": "Crystal Plasticity Analysis of Dislocation Accumulation in Impurity Doped-ULSI Cells"}]}, "item_3_biblio_info_186": {"attribute_name": "\u66f8\u8a8c\u60c5\u5831", "attribute_value_mlt": [{"bibliographicIssueDates": {"bibliographicIssueDate": "2009-08", "bibliographicIssueDateType": "Issued"}, "bibliographicIssueNumber": "756", "bibliographicPageEnd": "126", "bibliographicPageStart": "121", "bibliographicVolumeNumber": "75", "bibliographic_titles": [{"bibliographic_title": "\u65e5\u672c\u6a5f\u68b0\u5b66\u6703\u8ad6\u6587\u96c6. 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In this study, we make numerical models of ULSI cells where impurities are doped at some limited areas. Dislocation accumulation in the models during cooling processes of device fabrication is analysed by employing a technique of crystal plasticity analysis and evaluate the thermal stress, plastic slip deformation and accumulation of dislocations when the temprature drops from the initial value of 1000\u00b0C. Possibilities for the control of deslocation accumulation in impurity doped-ULSI cells are discussed.", "subitem_description_type": "Abstract"}]}, "item_3_description_185": {"attribute_name": "\u5185\u5bb9\u8a18\u8ff0", "attribute_value_mlt": [{"subitem_description": "\u672c\u6587\u30c7\u30fc\u30bf\u306f\u5b66\u5354\u4f1a\u306e\u8a31\u8afe\u306b\u57fa\u3065\u304dCiNii\u304b\u3089\u8907\u88fd\u3057\u305f\u3082\u306e\u3067\u3042\u308b", "subitem_description_type": "Other"}]}, "item_3_full_name_183": {"attribute_name": "\u8457\u8005\u5225\u540d", "attribute_value_mlt": [{"nameIdentifiers": [{"nameIdentifier": "38506", "nameIdentifierScheme": "WEKO"}], "names": [{"name": "SATO, Michihiro", "nameLang": "en"}]}, {"nameIdentifiers": [{"nameIdentifier": "38507", "nameIdentifierScheme": "WEKO"}], "names": [{"name": "OHASHI, Tetsuya", "nameLang": "en"}]}, {"nameIdentifiers": [{"nameIdentifier": "38508", "nameIdentifierScheme": "WEKO"}], "names": [{"name": "MARUIZUMI, Takuya", "nameLang": 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