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Ta-Zr合金による陽極酸化膜キャパシタの電気的特性に及ぼす熱処理温度と酸化膜厚低減の影響
https://kitami-it.repo.nii.ac.jp/records/7418
5cea4169-dfca-49d8-8a70-6820b16be22b
名前 / ファイル | ライセンス | アクション | |
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Item type | 学術雑誌論文 / Journal Article(1) | |||||
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公開日 | 2010-02-26 | |||||
タイトル | ||||||
言語 | ja | |||||
タイトル | Ta-Zr合金による陽極酸化膜キャパシタの電気的特性に及ぼす熱処理温度と酸化膜厚低減の影響 | |||||
タイトル | ||||||
言語 | en | |||||
タイトル | Influences of Heat-Treatment Temperature and Reduction of Oxide Thickness on Electrical Properties of Ta-Zr Anodized Thin Film Capacior | |||||
言語 | ||||||
言語 | jpn | |||||
キーワード | ||||||
言語 | ja | |||||
主題Scheme | Other | |||||
主題 | Ta-Zr陽極酸化膜キャパシタ | |||||
キーワード | ||||||
言語 | ja | |||||
主題Scheme | Other | |||||
主題 | 高い比誘電率 | |||||
キーワード | ||||||
言語 | ja | |||||
主題Scheme | Other | |||||
主題 | 低損失特性 | |||||
キーワード | ||||||
言語 | ja | |||||
主題Scheme | Other | |||||
主題 | 高信頼性 | |||||
キーワード | ||||||
言語 | ja | |||||
主題Scheme | Other | |||||
主題 | 耐熱性 | |||||
資源タイプ | ||||||
資源 | http://purl.org/coar/resource_type/c_6501 | |||||
タイプ | journal article | |||||
アクセス権 | ||||||
アクセス権 | open access | |||||
アクセス権URI | http://purl.org/coar/access_right/c_abf2 | |||||
著者 |
渡邊, 大介
× 渡邊, 大介× 後藤, 智利× 山根, 美佐雄× 佐々木, 克孝× 阿部, 良夫 |
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著者別名 | ||||||
姓名 | ||||||
姓名 | Watanabe, Daisuke | |||||
言語 | en | |||||
著者別名 | ||||||
姓名 | ||||||
姓名 | Goto, Tomoyoshi | |||||
言語 | en | |||||
著者別名 | ||||||
姓名 | ||||||
姓名 | Yamane, Misao | |||||
言語 | en | |||||
著者別名 | ||||||
姓名 | ||||||
姓名 | Sasaki, Katsutaka | |||||
言語 | en | |||||
著者別名 | ||||||
姓名 | ||||||
姓名 | Abe, Yoshio | |||||
言語 | en | |||||
抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | Ta2Nを用いた陽極酸化膜キャパシタは,耐熱性の向上を図れるが比誘電率の低下を伴うので,このことを回避するため,Ta-Zr合金の陽極酸化膜キャパシタを作製し,その電気的特性に及ぼす熱処理温度の影響と,酸化膜厚を低滅させた際にもTa2N陽極酸化膜キャパシタの場合と同様に低損失なキャパシタが実現可能か否かを検討した。その結果,Ta2Nの場合とは異なり比誘電率の低下を生じることなく耐熱性の向上が可能となり,かつ酸化膜厚を低減させても,Ta2Nの場合と同等以上に低損失なキャパシタが得られることがわかった。したがって,低損失,高耐熱でかつ高誘電率という特徴を兼ね備えた,高信頼性の陽極酸化膜キャパシタを実現する上で,Ta-Zr合金膜は有用な材料と結論できる。 | |||||
言語 | ja | |||||
内容記述 | ||||||
内容記述タイプ | Other | |||||
内容記述 | Copyright (c) by IEICE 許諾番号:09RC0073 IEICE Transactions Online : http://search.ieice.org/index.html |
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書誌情報 |
電子情報通信学会論文誌 巻 J85-C, 号 6, p. 455-461, 発行日 2002-06 |
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フォーマット | ||||||
内容記述タイプ | Other | |||||
内容記述 | application/pdf | |||||
出版者 | ||||||
出版者 | 社団法人 電子情報通信学会 | |||||
著者版フラグ | ||||||
値 | publisher | |||||
出版タイプ | ||||||
出版タイプ | VoR | |||||
出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 |