{"created":"2021-03-01T05:59:52.388167+00:00","id":7418,"links":{},"metadata":{"_buckets":{"deposit":"25bf7d83-3d6e-44a7-b712-a2dc4faab604"},"_deposit":{"id":"7418","owners":[],"pid":{"revision_id":0,"type":"depid","value":"7418"},"status":"published"},"_oai":{"id":"oai:kitami-it.repo.nii.ac.jp:00007418","sets":["1:86"]},"author_link":["38004","38005","38006","38007","38008","37999","38000","38001","38002","44879"],"item_1646810750418":{"attribute_name":"出版タイプ","attribute_value_mlt":[{"subitem_version_resource":"http://purl.org/coar/version/c_970fb48d4fbd8a85","subitem_version_type":"VoR"}]},"item_3_biblio_info_186":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"2002-06","bibliographicIssueDateType":"Issued"},"bibliographicIssueNumber":"6","bibliographicPageEnd":"461","bibliographicPageStart":"455","bibliographicVolumeNumber":"J85-C","bibliographic_titles":[{"bibliographic_title":"電子情報通信学会論文誌"}]}]},"item_3_description_184":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"Ta2Nを用いた陽極酸化膜キャパシタは，耐熱性の向上を図れるが比誘電率の低下を伴うので，このことを回避するため，Ta－Zr合金の陽極酸化膜キャパシタを作製し，その電気的特性に及ぼす熱処理温度の影響と，酸化膜厚を低滅させた際にもTa2N陽極酸化膜キャパシタの場合と同様に低損失なキャパシタが実現可能か否かを検討した。その結果，Ta2Nの場合とは異なり比誘電率の低下を生じることなく耐熱性の向上が可能となり，かつ酸化膜厚を低減させても，Ta2Nの場合と同等以上に低損失なキャパシタが得られることがわかった。したがって，低損失，高耐熱でかつ高誘電率という特徴を兼ね備えた，高信頼性の陽極酸化膜キャパシタを実現する上で，Ta－Zr合金膜は有用な材料と結論できる。","subitem_description_language":"ja","subitem_description_type":"Abstract"}]},"item_3_description_185":{"attribute_name":"内容記述","attribute_value_mlt":[{"subitem_description":"Copyright (c) by IEICE \n許諾番号：09RC0073\nIEICE Transactions Online :\nhttp://search.ieice.org/index.html","subitem_description_type":"Other"}]},"item_3_description_194":{"attribute_name":"フォーマット","attribute_value_mlt":[{"subitem_description":"application/pdf","subitem_description_type":"Other"}]},"item_3_full_name_183":{"attribute_name":"著者別名","attribute_value_mlt":[{"nameIdentifiers":[{"nameIdentifier":"38004","nameIdentifierScheme":"WEKO"}],"names":[{"name":"Watanabe, Daisuke","nameLang":"en"}]},{"nameIdentifiers":[{"nameIdentifier":"38005","nameIdentifierScheme":"WEKO"}],"names":[{"name":"Goto, Tomoyoshi","nameLang":"en"}]},{"nameIdentifiers":[{"nameIdentifier":"38006","nameIdentifierScheme":"WEKO"}],"names":[{"name":"Yamane, Misao","nameLang":"en"}]},{"nameIdentifiers":[{"nameIdentifier":"38007","nameIdentifierScheme":"WEKO"}],"names":[{"name":"Sasaki, Katsutaka","nameLang":"en"}]},{"nameIdentifiers":[{"nameIdentifier":"38008","nameIdentifierScheme":"WEKO"}],"names":[{"name":"Abe, 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