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  1. 学術雑誌掲載済論文
  2. 和雑誌

Ta2N陽極酸化膜キャパシタの耐熱要因と薄膜化の検討

https://kitami-it.repo.nii.ac.jp/records/7417
8fb242dd-5468-4d15-8b5a-86ac41313ef2
名前 / ファイル ライセンス アクション
8626996-3.pdf 8626996-3.pdf (830.9 kB)
Item type 学術雑誌論文 / Journal Article(1)
公開日 2010-02-26
タイトル
言語 ja
タイトル Ta2N陽極酸化膜キャパシタの耐熱要因と薄膜化の検討
タイトル
言語 en
タイトル Study on the Reason of Heat-Proof Property and the Reduction of Oxide Thickness of Ta2N Anodized Capacitor
言語
言語 jpn
キーワード
主題Scheme Other
主題 Ta2N化合物膜
キーワード
主題Scheme Other
主題 陽極酸化膜キャパシタ
キーワード
主題Scheme Other
主題 耐熱性
キーワード
主題Scheme Other
主題 tanδ
キーワード
主題Scheme Other
主題 酸化膜厚
資源タイプ
資源 http://purl.org/coar/resource_type/c_6501
タイプ journal article
アクセス権
アクセス権 open access
アクセス権URI http://purl.org/coar/access_right/c_abf2
その他のタイトル
その他のタイトル Study on the Reason of Heat-Proof Property and the Reduction of Oxide Thickness of Ta2N Anodized Capacitor
著者 山根, 美佐雄

× 山根, 美佐雄

WEKO 37989

ja 山根, 美佐雄

Search repository
佐々木, 克孝

× 佐々木, 克孝

WEKO 37990

ja 佐々木, 克孝

Search repository
阿部, 良夫

× 阿部, 良夫

WEKO 37991

ja 阿部, 良夫

Search repository
川村, みどり

× 川村, みどり

WEKO 37992

ja 川村, みどり

Search repository
野矢, 厚

× 野矢, 厚

WEKO 37993

ja 野矢, 厚

Search repository
著者別名
姓名
姓名 Yamane, Misao
言語 en
著者別名
姓名
姓名 Sasaki, Katsutaka
言語 en
著者別名
姓名
姓名 Abe, Yoshio
言語 en
著者別名
姓名
姓名 Kawamura, Midori
言語 en
著者別名
姓名
姓名 Noya, Atsushi
言語 en
抄録
内容記述タイプ Abstract
内容記述 Ta2N陽極酸化膜キャパシタは,Ta陽極酸化膜キャパシタに比べ耐熱性を著しく改善できる。オージェ電子分光分析等によってその原因を検討したところ,下地金属であるTa2N化合物膜自体の耐熱酸化性が大きく,Ta膜の場合より下地層への酸素拡散が生じにくいためであることがわかった。また,450℃以上の高温で生じるTa2Nキャパシタの熱劣化には,Ta膜の場合と同様に酸化膜中の酸素原子が下地金属方向へ拡散し下地金属界面層の厚さが増大することと共に,A1上部電極の熱酸化と電極/酸化物界面の崩壊も関与していることがわかった。次に,Ta2Nの耐熱酸化性に着目して更なる薄膜化を検討した結果,化成電圧を30Vまで低減させても160V化成したTaの場合よりも高耐熱で,且つ容量値も3倍以上の値を実現できることがわかった。
内容記述
内容記述タイプ Other
内容記述 Copyright (c) by IEICE
許諾番号:09RC0074
IEICE Transactions Online :
http://search.ieice.org/index.html
書誌情報 電子情報通信学会論文誌 C

巻 79, 号 C2, p. 358-365
フォーマット
内容記述タイプ Other
内容記述 application/pdf
出版者
出版者 社団法人 電子情報通信学会
著者版フラグ
値 publisher
出版タイプ
出版タイプ VoR
出版タイプResource http://purl.org/coar/version/c_970fb48d4fbd8a85
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