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Ta2N陽極酸化膜キャパシタの耐熱要因と薄膜化の検討
https://kitami-it.repo.nii.ac.jp/records/7417
8fb242dd-5468-4d15-8b5a-86ac41313ef2
名前 / ファイル | ライセンス | アクション | |
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Item type | 学術雑誌論文 / Journal Article(1) | |||||
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公開日 | 2010-02-26 | |||||
タイトル | ||||||
言語 | ja | |||||
タイトル | Ta2N陽極酸化膜キャパシタの耐熱要因と薄膜化の検討 | |||||
タイトル | ||||||
言語 | en | |||||
タイトル | Study on the Reason of Heat-Proof Property and the Reduction of Oxide Thickness of Ta2N Anodized Capacitor | |||||
言語 | ||||||
言語 | jpn | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | Ta2N化合物膜 | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | 陽極酸化膜キャパシタ | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | 耐熱性 | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | tanδ | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | 酸化膜厚 | |||||
資源タイプ | ||||||
資源 | http://purl.org/coar/resource_type/c_6501 | |||||
タイプ | journal article | |||||
アクセス権 | ||||||
アクセス権 | open access | |||||
アクセス権URI | http://purl.org/coar/access_right/c_abf2 | |||||
その他のタイトル | ||||||
その他のタイトル | Study on the Reason of Heat-Proof Property and the Reduction of Oxide Thickness of Ta2N Anodized Capacitor | |||||
著者 |
山根, 美佐雄
× 山根, 美佐雄× 佐々木, 克孝× 阿部, 良夫× 川村, みどり× 野矢, 厚 |
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著者別名 | ||||||
姓名 | ||||||
姓名 | Yamane, Misao | |||||
言語 | en | |||||
著者別名 | ||||||
姓名 | ||||||
姓名 | Sasaki, Katsutaka | |||||
言語 | en | |||||
著者別名 | ||||||
姓名 | ||||||
姓名 | Abe, Yoshio | |||||
言語 | en | |||||
著者別名 | ||||||
姓名 | ||||||
姓名 | Kawamura, Midori | |||||
言語 | en | |||||
著者別名 | ||||||
姓名 | ||||||
姓名 | Noya, Atsushi | |||||
言語 | en | |||||
抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | Ta2N陽極酸化膜キャパシタは,Ta陽極酸化膜キャパシタに比べ耐熱性を著しく改善できる。オージェ電子分光分析等によってその原因を検討したところ,下地金属であるTa2N化合物膜自体の耐熱酸化性が大きく,Ta膜の場合より下地層への酸素拡散が生じにくいためであることがわかった。また,450℃以上の高温で生じるTa2Nキャパシタの熱劣化には,Ta膜の場合と同様に酸化膜中の酸素原子が下地金属方向へ拡散し下地金属界面層の厚さが増大することと共に,A1上部電極の熱酸化と電極/酸化物界面の崩壊も関与していることがわかった。次に,Ta2Nの耐熱酸化性に着目して更なる薄膜化を検討した結果,化成電圧を30Vまで低減させても160V化成したTaの場合よりも高耐熱で,且つ容量値も3倍以上の値を実現できることがわかった。 | |||||
内容記述 | ||||||
内容記述タイプ | Other | |||||
内容記述 | Copyright (c) by IEICE 許諾番号:09RC0074 IEICE Transactions Online : http://search.ieice.org/index.html |
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書誌情報 |
電子情報通信学会論文誌 C 巻 79, 号 C2, p. 358-365 |
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フォーマット | ||||||
内容記述タイプ | Other | |||||
内容記述 | application/pdf | |||||
出版者 | ||||||
出版者 | 社団法人 電子情報通信学会 | |||||
著者版フラグ | ||||||
値 | publisher | |||||
出版タイプ | ||||||
出版タイプ | VoR | |||||
出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 |