WEKO3
AND
アイテム
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低化成電圧で作製したTa2N 陽極酸化膜キャパシタの耐熱特性
https://kitami-it.repo.nii.ac.jp/records/7416
b7de7826-cd9a-42db-8275-059d056d9b5e
| 名前 / ファイル | ライセンス | アクション | |
|---|---|---|---|
8626996-2.pdf (658.9 kB)
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| Item type | 学術雑誌論文 / Journal Article(1) | |||||
|---|---|---|---|---|---|---|
| 公開日 | 2010-02-26 | |||||
| タイトル | ||||||
| タイトル | 低化成電圧で作製したTa2N 陽極酸化膜キャパシタの耐熱特性 | |||||
| 言語 | ||||||
| 言語 | jpn | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | Ta2N化合物 | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | 陽極酸化膜キャパシタ | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | tanδ | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | 容量温度係数 | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | 漏れ電流特性 | |||||
| 資源タイプ | ||||||
| 資源 | http://purl.org/coar/resource_type/c_6501 | |||||
| タイプ | journal article | |||||
| その他のタイトル | ||||||
| その他のタイトル | A Study on the Hear-Proof Properties of Ta2N Anodized Thin Film Capacitors Prepared at Low Anodization Voltage | |||||
| 著者 |
佐々木, 克孝
× 佐々木, 克孝× 山根, 美佐雄× 阿部, 良夫× 野矢, 厚 |
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| 著者別名 | ||||||
| 識別子 | ||||||
| 識別子 | 37985 | |||||
| 識別子Scheme | WEKO | |||||
| 姓名 | ||||||
| 姓名 | Sasaki, Katsutaka | |||||
| 著者別名 | ||||||
| 識別子 | ||||||
| 識別子 | 37986 | |||||
| 識別子Scheme | WEKO | |||||
| 姓名 | ||||||
| 姓名 | Yamane, Misao | |||||
| 著者別名 | ||||||
| 識別子 | ||||||
| 識別子 | 37987 | |||||
| 識別子Scheme | WEKO | |||||
| 姓名 | ||||||
| 姓名 | Abe, Yoshio | |||||
| 著者別名 | ||||||
| 識別子 | ||||||
| 識別子 | 37988 | |||||
| 識別子Scheme | WEKO | |||||
| 姓名 | ||||||
| 姓名 | Noya, Atsushi | |||||
| 抄録 | ||||||
| 内容記述タイプ | Abstract | |||||
| 内容記述 | Ta2N陽極酸化膜キャパシタの有する高耐熱な特徴が，酸化醇厚を薄くした際にどの程度まで維持できるかを明らかにするため，化成電圧を低減させて作製したキャパシタのtanδ，容量温度係数および漏れ電流特性に及ぼす熱処理温度の増加の影響を検討し以下の知見を得た。80V程度まで化成電圧を低減させた陽極酸化膜キャパシタでも，熱処理温度が400℃までの範囲であればtanδと容量温度係数に熱劣化は生じない。漏れ電流特性についても，化成電圧を低減させても定性的に同様な傾向を示し，電気伝導機構に変化はない。一方，80V化成したこのTa2N陽極酸化膜キャパシタの漏れ電流特性は，熱処理温度300℃まではほとんど変化しないが，350℃では急増する。しかしながら，同じ静電容量が得られる160V化成したTa陽極酸化膜キャパシタと比較すると，この80V化成したTa2N陽極酸化膜キャパシタは，tanδ，容量温度係数，漏れ電流のいずれの点でも耐熱性が大幅に改善される。以上のことより，Ta2N化合物の利用は酸化膜を薄くしても耐熱性を保持するうえで極めて有効な方策となることを明らかにした。 | |||||
| 内容記述 | ||||||
| 内容記述タイプ | Other | |||||
| 内容記述 | Copyright (c) by IEICE 許諾番号：09RC0075 IEICE Transactions Online : http://search.ieice.org/index.html |
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| 書誌情報 |
電子情報通信学会論文誌 巻 J78-C-II, 号 3, p. 10-15, 発行日 1995-03 |
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| フォーマット | ||||||
| 内容記述タイプ | Other | |||||
| 内容記述 | application/pdf | |||||
| 著者版フラグ | ||||||
| 値 | publisher | |||||
| 出版者 | ||||||
| 出版者 | 社団法人 電子情報通信学会 | |||||
