{"created":"2021-03-01T05:59:52.265737+00:00","id":7416,"links":{},"metadata":{"_buckets":{"deposit":"ace5c4a7-cb0a-4b2c-8bf9-00d8b1c3dfed"},"_deposit":{"id":"7416","owners":[],"pid":{"revision_id":0,"type":"depid","value":"7416"},"status":"published"},"_oai":{"id":"oai:kitami-it.repo.nii.ac.jp:00007416","sets":["1:86"]},"author_link":["37985","37986","37987","37988","37981","37982","37983","37984"],"item_1646810750418":{"attribute_name":"出版タイプ","attribute_value_mlt":[{"subitem_version_resource":"http://purl.org/coar/version/c_970fb48d4fbd8a85","subitem_version_type":"VoR"}]},"item_3_alternative_title_198":{"attribute_name":"その他のタイトル","attribute_value_mlt":[{"subitem_alternative_title":"A Study on the Hear-Proof Properties of Ta2N Anodized Thin Film Capacitors Prepared at Low Anodization Voltage"}]},"item_3_biblio_info_186":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueNumber":"3","bibliographicPageEnd":"15","bibliographicPageStart":"10","bibliographicVolumeNumber":"J78-C-II","bibliographic_titles":[{"bibliographic_title":"電子情報通信学会論文誌"}]}]},"item_3_description_184":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"Ta2N陽極酸化膜キャパシタの有する高耐熱な特徴が，酸化醇厚を薄くした際にどの程度まで維持できるかを明らかにするため，化成電圧を低減させて作製したキャパシタのtanδ，容量温度係数および漏れ電流特性に及ぼす熱処理温度の増加の影響を検討し以下の知見を得た。80V程度まで化成電圧を低減させた陽極酸化膜キャパシタでも，熱処理温度が400℃までの範囲であればtanδと容量温度係数に熱劣化は生じない。漏れ電流特性についても，化成電圧を低減させても定性的に同様な傾向を示し，電気伝導機構に変化はない。一方，80V化成したこのTa2N陽極酸化膜キャパシタの漏れ電流特性は，熱処理温度300℃まではほとんど変化しないが，350℃では急増する。しかしながら，同じ静電容量が得られる160V化成したTa陽極酸化膜キャパシタと比較すると，この80V化成したTa2N陽極酸化膜キャパシタは，tanδ，容量温度係数，漏れ電流のいずれの点でも耐熱性が大幅に改善される。以上のことより，Ta2N化合物の利用は酸化膜を薄くしても耐熱性を保持するうえで極めて有効な方策となることを明らかにした。","subitem_description_type":"Abstract"}]},"item_3_description_185":{"attribute_name":"内容記述","attribute_value_mlt":[{"subitem_description":"Copyright (c) by IEICE \n許諾番号：09RC0075\nIEICE Transactions Online :\nhttp://search.ieice.org/index.html","subitem_description_type":"Other"}]},"item_3_description_194":{"attribute_name":"フォーマット","attribute_value_mlt":[{"subitem_description":"application/pdf","subitem_description_type":"Other"}]},"item_3_full_name_183":{"attribute_name":"著者別名","attribute_value_mlt":[{"nameIdentifiers":[{"nameIdentifier":"37985","nameIdentifierScheme":"WEKO"}],"names":[{"name":"Sasaki, Katsutaka","nameLang":"en"}]},{"nameIdentifiers":[{"nameIdentifier":"37986","nameIdentifierScheme":"WEKO"}],"names":[{"name":"Yamane, Misao","nameLang":"en"}]},{"nameIdentifiers":[{"nameIdentifier":"37987","nameIdentifierScheme":"WEKO"}],"names":[{"name":"Abe, Yoshio","nameLang":"en"}]},{"nameIdentifiers":[{"nameIdentifier":"37988","nameIdentifierScheme":"WEKO"}],"names":[{"name":"Noya, Atsushi","nameLang":"en"}]}]},"item_3_publisher_212":{"attribute_name":"出版者","attribute_value_mlt":[{"subitem_publisher":"社団法人 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厚","creatorNameLang":"ja"}],"nameIdentifiers":[{}]}]},"item_files":{"attribute_name":"ファイル情報","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"2016-11-22"}],"displaytype":"detail","filename":"8626996-2.pdf","filesize":[{"value":"658.9 kB"}],"format":"application/pdf","licensetype":"license_note","mimetype":"application/pdf","url":{"label":"8626996-2.pdf","url":"https://kitami-it.repo.nii.ac.jp/record/7416/files/8626996-2.pdf"},"version_id":"702c1ec5-79f1-4725-8658-cc091f0a73ba"}]},"item_keyword":{"attribute_name":"キーワード","attribute_value_mlt":[{"subitem_subject":"Ta2N化合物","subitem_subject_scheme":"Other"},{"subitem_subject":"陽極酸化膜キャパシタ","subitem_subject_scheme":"Other"},{"subitem_subject":"tanδ","subitem_subject_scheme":"Other"},{"subitem_subject":"容量温度係数","subitem_subject_scheme":"Other"},{"subitem_subject":"漏れ電流特性","subitem_subject_scheme":"Other"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"jpn"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"journal article","resourceuri":"http://purl.org/coar/resource_type/c_6501"}]},"item_title":"低化成電圧で作製したTa2N 陽極酸化膜キャパシタの耐熱特性","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"低化成電圧で作製したTa2N 陽極酸化膜キャパシタの耐熱特性","subitem_title_language":"ja"},{"subitem_title":"A Study on the Hear-Proof Properties of Ta2N Anodized Thin Film Capacitors Prepared at Low Anodization Voltage","subitem_title_language":"en"}]},"item_type_id":"3","owner":"1","path":["86"],"pubdate":{"attribute_name":"PubDate","attribute_value":"2010-02-26"},"publish_date":"2010-02-26","publish_status":"0","recid":"7416","relation_version_is_last":true,"title":["低化成電圧で作製したTa2N 陽極酸化膜キャパシタの耐熱特性"],"weko_creator_id":"1","weko_shared_id":-1},"updated":"2022-12-13T02:20:51.942281+00:00"}