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Ta2N 陽極酸化膜による耐熱性に優れた薄膜キャパシタの作製
https://kitami-it.repo.nii.ac.jp/records/7415
b8cc7159-4f4e-4620-b174-b706305b2fba
名前 / ファイル | ライセンス | アクション | |
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Item type | 学術雑誌論文 / Journal Article(1) | |||||
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公開日 | 2010-02-26 | |||||
タイトル | ||||||
言語 | ja | |||||
タイトル | Ta2N 陽極酸化膜による耐熱性に優れた薄膜キャパシタの作製 | |||||
タイトル | ||||||
言語 | en | |||||
タイトル | Thermally Stable Thin-Film Anodized Capacior Made of Ta2N Compound Film | |||||
言語 | ||||||
言語 | jpn | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | Ta2N化合物薄膜 | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | 陽極酸化膜キャパシタ | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | 耐熱キャパシタ | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | 界面層 | |||||
資源タイプ | ||||||
資源 | http://purl.org/coar/resource_type/c_6501 | |||||
タイプ | journal article | |||||
アクセス権 | ||||||
アクセス権 | open access | |||||
アクセス権URI | http://purl.org/coar/access_right/c_abf2 | |||||
その他のタイトル | ||||||
その他のタイトル | Thermally Stable Thin-Film Anodized Capacior Made of Ta2N Compound Film | |||||
著者 |
山根, 美佐雄
× 山根, 美佐雄× 関, 光× 佐々木, 克孝× 野矢, 厚× 白重, 道弘 |
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著者別名 | ||||||
姓名 | ||||||
姓名 | Yamane, Misao | |||||
言語 | en | |||||
著者別名 | ||||||
姓名 | ||||||
姓名 | Seki, Hikaru | |||||
言語 | en | |||||
著者別名 | ||||||
姓名 | ||||||
姓名 | Sasaki, Katsutaka | |||||
言語 | en | |||||
著者別名 | ||||||
姓名 | ||||||
姓名 | Noya, Atsushi | |||||
言語 | en | |||||
著者別名 | ||||||
姓名 | ||||||
姓名 | Shirashige, Michihiro | |||||
言語 | en | |||||
抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | Ta2N化合物薄膜の陽極酸化膜を用いることにより,450℃まで特性の劣化しない耐熱性に優れた薄膜キャパシタを実現できた。このことは,Taと化学結合を形成している窒素原子が,酸素拡散に対してより有効な抑制効果を果たすことによるものと推察された。 | |||||
内容記述 | ||||||
内容記述タイプ | Other | |||||
内容記述 | Copyright (c) by IEICE 許諾番号:09RC0076 IEICE Transactions Online : http://search.ieice.org/index.html |
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書誌情報 |
電子情報通信学会論文誌 巻 J76-C-II, 号 8, p. 6-8, 発行日 1993-08 |
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フォーマット | ||||||
内容記述タイプ | Other | |||||
内容記述 | application/pdf | |||||
出版者 | ||||||
出版者 | 社団法人 電子情報通信学会 | |||||
著者版フラグ | ||||||
値 | publisher | |||||
出版タイプ | ||||||
出版タイプ | VoR | |||||
出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 |