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Al3Ta陽極酸化膜キャパシタの作製とその耐熱性
https://kitami-it.repo.nii.ac.jp/records/7414
9daabe7b-2887-453c-aaf0-19905dce3314
名前 / ファイル | ライセンス | アクション | |
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Item type | 学術雑誌論文 / Journal Article(1) | |||||
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公開日 | 2010-02-26 | |||||
タイトル | ||||||
言語 | ja | |||||
タイトル | Al3Ta陽極酸化膜キャパシタの作製とその耐熱性 | |||||
タイトル | ||||||
言語 | en | |||||
タイトル | Preparation of Al3Ta Anodized Thin Film Capacitor and Its Heat-Proof Property | |||||
言語 | ||||||
言語 | jpn | |||||
キーワード | ||||||
言語 | ja | |||||
主題Scheme | Other | |||||
主題 | Al3Ta金属間化合物膜 | |||||
キーワード | ||||||
言語 | ja | |||||
主題Scheme | Other | |||||
主題 | 陽極酸化膜キャパシタ | |||||
キーワード | ||||||
言語 | ja | |||||
主題Scheme | Other | |||||
主題 | 容量 | |||||
キーワード | ||||||
言語 | ja | |||||
主題Scheme | Other | |||||
主題 | 耐熱性 | |||||
資源タイプ | ||||||
資源 | http://purl.org/coar/resource_type/c_6501 | |||||
タイプ | journal article | |||||
アクセス権 | ||||||
アクセス権 | open access | |||||
アクセス権URI | http://purl.org/coar/access_right/c_abf2 | |||||
著者 |
田邊, 彩
× 田邊, 彩× 山根, 美佐雄× 佐々木, 克孝× 阿部, 良夫 |
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著者別名 | ||||||
姓名 | ||||||
姓名 | Tanabe, Aya | |||||
言語 | en | |||||
著者別名 | ||||||
姓名 | ||||||
姓名 | Yamane, Misao | |||||
言語 | en | |||||
著者別名 | ||||||
姓名 | ||||||
姓名 | Sasaki, Katsutaka | |||||
言語 | en | |||||
著者別名 | ||||||
姓名 | ||||||
姓名 | Abe, Yoshio | |||||
言語 | en | |||||
抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | 容量の低減を伴わずTa陽極酸化膜キャパシタの耐熱性を改善するため,Al3Ta金属間化合物膜を作製し,その陽極酸化膜キャパシタの耐熱性を評価した。その結果,容量の低減をTaの値の2割程度までに抑制したまま,Ta2N陽極酸化膜キャパシタに次ぐ,高耐熱な薄膜キャパシタとなることがわかった。 | |||||
言語 | ja | |||||
内容記述 | ||||||
内容記述タイプ | Other | |||||
内容記述 | Copyright (c) by IEICE 許諾番号:09RC0077 IEICE Transactions Online : http://search.ieice.org/index.html |
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言語 | ja | |||||
書誌情報 |
電子情報通信学会論文誌 巻 J83-C, 号 10, p. 972-974, 発行日 2000-10 |
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フォーマット | ||||||
内容記述タイプ | Other | |||||
内容記述 | application/pdf | |||||
出版者 | ||||||
出版者 | 社団法人 電子情報通信学会 | |||||
著者版フラグ | ||||||
値 | publisher | |||||
出版タイプ | ||||||
出版タイプ | VoR | |||||
出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 |