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  1. 学術雑誌掲載済論文
  2. 和雑誌

Al3Hf金属間化合物の陽極酸化膜による高耐熱、高信頼性薄膜キャパシタの検討

https://kitami-it.repo.nii.ac.jp/records/7411
2b974371-62d9-4412-a68a-bfaadd9517ef
名前 / ファイル ライセンス アクション
8663743-1.pdf 8663743-1.pdf (971.9 kB)
Item type 学術雑誌論文 / Journal Article(1)
公開日 2010-02-26
タイトル
言語 ja
タイトル Al3Hf金属間化合物の陽極酸化膜による高耐熱、高信頼性薄膜キャパシタの検討
タイトル
言語 en
タイトル A Study on the thin Film Capacitor with High Heat-Proof Property and High Reliability by Using Anodized Film of Al3Hf Intermetallic Compound
言語
言語 jpn
キーワード
言語 ja
主題Scheme Other
主題 Al3Zr金属間化合物膜
キーワード
言語 ja
主題Scheme Other
主題 Al3Zr陽極酸化膜
キーワード
言語 ja
主題Scheme Other
主題 高信頼性薄膜キャパシタ
キーワード
言語 ja
主題Scheme Other
主題 漏れ電流特性
キーワード
言語 ja
主題Scheme Other
主題 周波数依存症
資源タイプ
資源 http://purl.org/coar/resource_type/c_6501
タイプ journal article
アクセス権
アクセス権 open access
アクセス権URI http://purl.org/coar/access_right/c_abf2
著者 尾関, 雅彦

× 尾関, 雅彦

WEKO 37927

ja 尾関, 雅彦

Search repository
山根, 美佐雄

× 山根, 美佐雄

WEKO 37928

ja 山根, 美佐雄

Search repository
佐々木, 克孝

× 佐々木, 克孝

WEKO 37929

ja 佐々木, 克孝

Search repository
阿部, 良夫

× 阿部, 良夫

WEKO 44879
KAKEN - 研究者検索 20261399

ja 阿部, 良夫

Search repository
柳沢, 英人

× 柳沢, 英人

WEKO 37931

ja 柳沢, 英人

Search repository
川村, みどり

× 川村, みどり

WEKO 44880
KAKEN - 研究者検索 70261401

ja 川村, みどり

Search repository
著者別名
姓名
姓名 Ozeki, Masahiko
言語 en
著者別名
姓名
姓名 Yamane, Misao
言語 en
著者別名
姓名
姓名 Sasaki, Katsutaka
言語 en
著者別名
姓名
姓名 Abe, Yoshio
言語 en
著者別名
姓名
姓名 Yanagisawa, Hideto
言語 en
著者別名
姓名
姓名 Kawamura, Midori
言語 en
抄録
内容記述タイプ Abstract
内容記述 高耐熱で高信頼性の薄膜キャパシタを実現するため,熱的に高安定な化学量論的Al3Hf金属間化合物膜の作製条件を検討すると共に,Al3Hf陽極酸化膜キャパシタを作製し,そのキャパシタ特性や周波数特性および漏れ電流特性を酸化膜厚の低減効果と耐熱性との関連において検討した。その結果,この陽極酸化膜は,化成電圧を10Vまで低減させて酸化膜の薄膜化を図っても,tanδ,TCCにほとんど変化は見られず,かつ5V印加時の漏れ電流は10-9A台と極めて低い値が得られ,十分な薄膜化が可能であった.また耐熱性の点では,酸化膜厚が比較的厚い160V化成のキャパシタでは540℃まで,酸化膜厚が極めて薄い10V化成の場合では450℃まで,キャパシタ特性と漏れ電流特性に熱劣化は見られず,極めて耐熱性に優れていることがわかった。更に,測定周波数を1kHzから1MHzまで変化させても,静電容量に周波数依存性はほとんど見られなかった。以上の結果から,本研究で用いたAl3Hf陽極酸化膜は,高耐熱で高信頼性薄膜キャパシタ用の誘電体材料として極めて有望と結論できる。
言語 ja
内容記述
内容記述タイプ Other
内容記述 Copyright (c) by IEICE
許諾番号:09RC0080
IEICE Transactions Online :
http://search.ieice.org/index.html
言語 ja
書誌情報 電子情報通信学会論文誌

巻 J81-C-II, 号 7, p. 619-627, 発行日 1998
フォーマット
内容記述タイプ Other
内容記述 application/pdf
出版者
出版者 社団法人 電子情報通信学会
著者版フラグ
値 publisher
出版タイプ
出版タイプ VoR
出版タイプResource http://purl.org/coar/version/c_970fb48d4fbd8a85
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