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Characterization of thermally stable Ir-Ta alloy thin films deposited by sputtering
https://kitami-it.repo.nii.ac.jp/records/7168
https://kitami-it.repo.nii.ac.jp/records/7168c027c779-0553-470b-9756-619297b40166
名前 / ファイル | ライセンス | アクション |
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4657.pdf (12.4 MB)
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Item type | 学術雑誌論文 / Journal Article(1) | |||||
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公開日 | 2007-05-10 | |||||
タイトル | ||||||
言語 | en | |||||
タイトル | Characterization of thermally stable Ir-Ta alloy thin films deposited by sputtering | |||||
言語 | ||||||
言語 | eng | |||||
資源タイプ | ||||||
資源 | http://purl.org/coar/resource_type/c_6501 | |||||
タイプ | journal article | |||||
アクセス権 | ||||||
アクセス権 | open access | |||||
アクセス権URI | http://purl.org/coar/access_right/c_abf2 | |||||
著者 |
Watanabe, E.
× Watanabe, E.× Abe, Y.× Sasaki, K.× Iura, S. |
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著者別名 | ||||||
姓名 | 阿部, 良夫 | |||||
言語 | ja | |||||
著者別名 | ||||||
姓名 | 佐々木, 克孝 | |||||
言語 | ja | |||||
抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | Ir-Ta alloy thin films were deposited on Si0_2/Si substrates by a magnetron sputtering system using pure Ar as sputtering gas. The lr/Ta composition ratio of the alloy films was varied by changing the number of Ta chips on an lr target. The crystal structure of the alloy films changed from fcc-Ir to lr_3Ta, α-(Ir,Ta), Ta_3Ir, and bcc-Ta with increasing Ta content. Post-deposition annealing of the alloy films was carried out in oxygen at temperatures from 300℃ to 800℃ for 1 hour. The alloy films with Ta contents of 10-50 at.% indicated low electrical resistivities below 220 μΩcm and the low resistivities were remained after annealing up to 600℃. | |||||
書誌情報 |
Vacuum 巻 74, 号 3-4, p. 735-739, 発行日 2004-06 |
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DOI | ||||||
識別子タイプ | DOI | |||||
関連識別子 | http://doi.org/10.1016/j.vacuum.2004.01.058 | |||||
権利 | ||||||
権利情報 | http://www.sciencedirect.com/science/journal/0042207X | |||||
権利 | ||||||
権利情報 | Elsevier, E. Watanabe, Y. Abe, K. Sasaki, S. Iura, Vacuum, 74(3-4), 2004, 735-739. | |||||
フォーマット | ||||||
内容記述タイプ | Other | |||||
内容記述 | application/pdf | |||||
出版者 | ||||||
出版者 | Elsevier | |||||
著者版フラグ | ||||||
値 | author | |||||
出版タイプ | ||||||
出版タイプ | AM | |||||
出版タイプResource | http://purl.org/coar/version/c_ab4af688f83e57aa |