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  1. 学術雑誌掲載済論文

Epitaxial growth of (111)ZrN thin films on (111)Si substrate by reactive sputtering and their surface morphologies

https://kitami-it.repo.nii.ac.jp/records/7085
https://kitami-it.repo.nii.ac.jp/records/7085
10a0cf64-7961-40ff-9ba2-fdacdab62fc7
Item type 学術雑誌論文 / Journal Article(1)
公開日 2007-05-09
タイトル
タイトル Epitaxial growth of (111)ZrN thin films on (111)Si substrate by reactive sputtering and their surface morphologies
言語
言語 eng
資源タイプ
資源 http://purl.org/coar/resource_type/c_6501
タイプ journal article
アクセス権
アクセス権 metadata only access
アクセス権URI http://purl.org/coar/access_right/c_14cb
著者 H., Yanagisawa

× H., Yanagisawa

WEKO 35970

H., Yanagisawa

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S., Shinkai

× S., Shinkai

WEKO 35971

S., Shinkai

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K., Sasaki

× K., Sasaki

WEKO 35972

K., Sasaki

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J., Sakurai

× J., Sakurai

WEKO 35973

J., Sakurai

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Y., Abe

× Y., Abe

WEKO 35974

Y., Abe

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A., Sakai

× A., Sakai

WEKO 35975

A., Sakai

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S., Zaima

× S., Zaima

WEKO 35976

S., Zaima

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書誌情報 巻 297, 号 1, p. 80-86, 発行日 2006-12
DOI
識別子タイプ DOI
関連識別子 http://doi.org/10.1016/j.jcrysgro.2006.09.013
出版者
出版者 Elsevier
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