@article{oai:kitami-it.repo.nii.ac.jp:00007085,
 author = {H., Yanagisawa and S., Shinkai and K., Sasaki and J., Sakurai and Y., Abe and A., Sakai and S., Zaima},
 issue = {1},
 month = {Dec},
 pages = {80--86},
 title = {Epitaxial growth of (111)ZrN thin films on (111)Si substrate by reactive sputtering and their surface morphologies},
 volume = {297},
 year = {2006}
}