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  1. 学術雑誌掲載済論文
  2. 洋雑誌

Effects of the Ar-N_2 Sputtering Gas Mixture on the Preferential Orientation of sputtered Ru Films

https://kitami-it.repo.nii.ac.jp/records/6905
81927600-475a-4652-8dab-f273b45d906e
名前 / ファイル ライセンス アクション
4638.pdf 4638.pdf (175.7 kB)
Item type 学術雑誌論文 / Journal Article(1)
公開日 2007-04-19
タイトル
言語 en
タイトル Effects of the Ar-N_2 Sputtering Gas Mixture on the Preferential Orientation of sputtered Ru Films
言語
言語 eng
資源タイプ
資源 http://purl.org/coar/resource_type/c_6501
タイプ journal article
アクセス権
アクセス権 open access
アクセス権URI http://purl.org/coar/access_right/c_abf2
著者 Kawamura, Midori

× Kawamura, Midori

WEKO 34931

en Kawamura, Midori

Search repository
Yagi, Kenji

× Yagi, Kenji

WEKO 34932

en Yagi, Kenji

Search repository
Abe, Yoshio

× Abe, Yoshio

WEKO 34933

en Abe, Yoshio

Search repository
Sasaki, Katsutaka

× Sasaki, Katsutaka

WEKO 34934

en Sasaki, Katsutaka

Search repository
著者別名
姓名
姓名 川村, みどり
言語 ja
著者別名
姓名
姓名 阿部, 良夫
言語 ja
著者別名
姓名
姓名 佐々木, 克孝
言語 ja
抄録
内容記述タイプ Abstract
内容記述 We have investigated the influence of N_2 addition to the Ar sputtering gas on the crystal orientation of sputtered Ru films. An rf magnetron sputtering apparatus with a Ru target (99.9%) and a glass substrate heated to 100°C or 300°C was used for the deposition. The crystal structure, chemical composition and electrical properties of the resultant films were investigated. X-ray diffraction (XRD) revealed the dominant orientation at 0% N_2 to be the c-axis. With increasing proportion of N_2 in the sputtering gas at a substrate temperature of 100°C, the intensity of the (002) peak decreased, finally disappearing at 50% N_2. This c-axis suppressed Ru film sputtered at 50% N_2 was found to contain nitrogen by Auger electron spectroscopy (AES), but by annealing the film in vacuum at 400°C, the nitrogen in the film was completely removed. The film orientation remained the same as before annealing. Thus, we have demonstrated a new method for depositing Ru films with a controlled preferential orientation of either c-axis oriented or c-axis suppressed.
書誌情報 Thin Solid Films

巻 494, 号 1-2, p. 240-243, 発行日 2006-01
DOI
関連識別子
識別子タイプ DOI
関連識別子 http://doi.org/10.1016/j.tsf.2005.08.130
権利
権利情報 http://www.sciencedirect.com/science/journal/00406090
権利
権利情報 Elsevier B.V., Midori Kawamura, Kenji Yagi, Yoshio Abe and Katsutaka Sasaki, Thin Solid Films, 494(1-2), 2006, 240-243.
フォーマット
内容記述タイプ Other
内容記述 application/pdf
出版者
出版者 Elsevier
著者版フラグ
値 author
出版タイプ
出版タイプ AM
出版タイプResource http://purl.org/coar/version/c_ab4af688f83e57aa
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