| Item type |
学術雑誌論文 / Journal Article(1) |
| 公開日 |
2007-04-19 |
| タイトル |
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|
タイトル |
Effects of the Ar-N_2 Sputtering Gas Mixture on the Preferential Orientation of sputtered Ru Films |
|
言語 |
en |
| 言語 |
|
|
言語 |
eng |
| 資源タイプ |
|
|
資源 |
http://purl.org/coar/resource_type/c_6501 |
|
タイプ |
journal article |
| アクセス権 |
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アクセス権 |
open access |
|
アクセス権URI |
http://purl.org/coar/access_right/c_abf2 |
| 著者 |
Kawamura, Midori
Yagi, Kenji
Abe, Yoshio
Sasaki, Katsutaka
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| 抄録 |
|
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内容記述タイプ |
Abstract |
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内容記述 |
We have investigated the influence of N_2 addition to the Ar sputtering gas on the crystal orientation of sputtered Ru films. An rf magnetron sputtering apparatus with a Ru target (99.9%) and a glass substrate heated to 100°C or 300°C was used for the deposition. The crystal structure, chemical composition and electrical properties of the resultant films were investigated. X-ray diffraction (XRD) revealed the dominant orientation at 0% N_2 to be the c-axis. With increasing proportion of N_2 in the sputtering gas at a substrate temperature of 100°C, the intensity of the (002) peak decreased, finally disappearing at 50% N_2. This c-axis suppressed Ru film sputtered at 50% N_2 was found to contain nitrogen by Auger electron spectroscopy (AES), but by annealing the film in vacuum at 400°C, the nitrogen in the film was completely removed. The film orientation remained the same as before annealing. Thus, we have demonstrated a new method for depositing Ru films with a controlled preferential orientation of either c-axis oriented or c-axis suppressed. |
| 書誌情報 |
Thin Solid Films
巻 494,
号 1-2,
p. 240-243,
発行日 2006-01
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| DOI |
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識別子タイプ |
DOI |
|
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関連識別子 |
http://doi.org/10.1016/j.tsf.2005.08.130 |
| 権利 |
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権利情報 |
http://www.sciencedirect.com/science/journal/00406090 |
| 権利 |
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|
権利情報 |
Elsevier B.V., Midori Kawamura, Kenji Yagi, Yoshio Abe and Katsutaka Sasaki, Thin Solid Films, 494(1-2), 2006, 240-243. |
| フォーマット |
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内容記述タイプ |
Other |
|
内容記述 |
application/pdf |
| 出版者 |
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出版者 |
Elsevier |
|
言語 |
en |
| 著者版フラグ |
|
|
言語 |
en |
|
値 |
author |
| 出版タイプ |
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|
出版タイプ |
AM |
|
出版タイプResource |
http://purl.org/coar/version/c_ab4af688f83e57aa |
4638.pdf (175.7 kB)
