Item type |
学術雑誌論文 / Journal Article(1) |
公開日 |
2007-04-19 |
タイトル |
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タイトル |
Characterization of Ag oxide thin films prepared by reactive RF sputtering |
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言語 |
en |
言語 |
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言語 |
eng |
資源タイプ |
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資源 |
http://purl.org/coar/resource_type/c_6501 |
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タイプ |
journal article |
アクセス権 |
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アクセス権 |
open access |
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アクセス権URI |
http://purl.org/coar/access_right/c_abf2 |
著者 |
Abe, Yoshio
Hasegawa, Tomoaki
Kawamura, Midori
Sasaki, Katsutaka
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著者別名 |
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識別子Scheme |
WEKO |
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識別子 |
44879 |
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識別子Scheme |
KAKEN |
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識別子URI |
https://nrid.nii.ac.jp/ja/nrid/1000020261399 |
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識別子 |
20261399 |
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姓名 |
阿部, 良夫 |
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言語 |
ja |
著者別名 |
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識別子Scheme |
WEKO |
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識別子 |
44880 |
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識別子Scheme |
KAKEN |
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識別子URI |
https://nrid.nii.ac.jp/ja/nrid/1000070261401 |
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識別子 |
70261401 |
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姓名 |
川村, みどり |
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言語 |
ja |
著者別名 |
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識別子Scheme |
WEKO |
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識別子 |
34891 |
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姓名 |
佐々木, 克孝 |
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言語 |
ja |
抄録 |
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内容記述タイプ |
Abstract |
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内容記述 |
Ag oxide thin films were grown on glass substrates by sputtering an Ag target in an Ar+O_2 mixed gas. Effects of O_2 flow ratio on resistivity, reflectance and transmittance of the Ag oxide films were studied. Crystal structure and chemical binding state of the films were characterized by X-ray diffraction, X-ray photoelectron spectroscopy, and scanning electron microscopy. Ag films with a resistivity of 4 μΩcm and a reflectance of 98% were obtained at O_2 flow ratios below 5%. The increase of resistivity and the decrease of reflectance were observed with increasing O_2 flow ratio due to the formation of mixed films of Ag and Ag oxide. Above an O_2 flow ratio of 40%, the transmittance of the films increased and semitransparent Ag_2O films with resistivity of an order of 10^8Ωcm were formed. |
書誌情報 |
Vacuum
巻 76,
号 1,
p. 1-6,
発行日 2004-10
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DOI |
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識別子タイプ |
DOI |
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関連識別子 |
http://doi.org/10.1016/j.vacuum.2004.05.003 |
権利 |
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権利情報 |
http://www.sciencedirect.com/science/journal/0042207X |
権利 |
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権利情報 |
Elsevier Ltd., Yoshio Abe, Tomoaki Hasegawa, Midori Kawamura and Katsutaka Sasaki, Vacuum, 76(1), 2004, 1-6. |
フォーマット |
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内容記述タイプ |
Other |
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内容記述 |
application/pdf |
出版者 |
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出版者 |
Elsevier |
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言語 |
en |
著者版フラグ |
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言語 |
en |
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値 |
author |
出版タイプ |
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出版タイプ |
AM |
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出版タイプResource |
http://purl.org/coar/version/c_ab4af688f83e57aa |