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Preparation and characterization of PZT thin films on ITO/glass substrate by CSD
https://kitami-it.repo.nii.ac.jp/records/6828
https://kitami-it.repo.nii.ac.jp/records/6828797d9ad5-93e8-4763-9af7-616454c0d19c
名前 / ファイル | ライセンス | アクション |
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Item type | 学術雑誌論文 / Journal Article(1) | |||||
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公開日 | 2007-04-17 | |||||
タイトル | ||||||
言語 | en | |||||
タイトル | Preparation and characterization of PZT thin films on ITO/glass substrate by CSD | |||||
言語 | ||||||
言語 | eng | |||||
資源タイプ | ||||||
資源 | http://purl.org/coar/resource_type/c_6501 | |||||
タイプ | journal article | |||||
アクセス権 | ||||||
アクセス権 | open access | |||||
アクセス権URI | http://purl.org/coar/access_right/c_abf2 | |||||
著者 |
Ohno, Tomoya
× Ohno, Tomoya× Fujimoto, Masayuki× Suzuki, Hisao |
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著者別名 | ||||||
姓名 | 大野, 智也 | |||||
言語 | ja | |||||
抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | This paper describes the deposition of PZT thin films on soda-lime glass substrate with ITO bottom electrode by CSD (Chemical Solution Deposition). The transmittance of the obtained PZT thin film on ITO/glass substrate was about 60 % in the visible light region. The deposited transparent PZT thin film exhibited the ferroelectricity of P_r = 36.3 μC/cm^2 and E_c = 71.3 kV/cm. In addition, the piezoelectric property of the resultant PZT thin film was relatively large and exhibited the measured effective d_33 of 120 pC/N after the polarization. | |||||
書誌情報 |
Key Engineering Materials 巻 301, p. 41-44, 発行日 2006 |
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権利 | ||||||
権利情報 | http://www.ttp.net/1013-9826.html | |||||
権利 | ||||||
権利情報 | Trans Tech Publications, T. Ohno, M. Fujimoto, H. Suzuki, Key Engineering Materials, 301, 2006, 41-44. | |||||
フォーマット | ||||||
内容記述タイプ | Other | |||||
内容記述 | application/pdf | |||||
出版者 | ||||||
出版者 | Trans Tech Publications | |||||
著者版フラグ | ||||||
値 | author | |||||
出版タイプ | ||||||
出版タイプ | AM | |||||
出版タイプResource | http://purl.org/coar/version/c_ab4af688f83e57aa |