@article{oai:kitami-it.repo.nii.ac.jp:00006828,
 author = {Ohno, Tomoya and Fujimoto, Masayuki and Suzuki, Hisao},
 journal = {Key Engineering Materials},
 month = {},
 note = {This paper describes the deposition of PZT thin films on soda-lime glass substrate with ITO bottom electrode by CSD (Chemical Solution Deposition). The transmittance of the obtained PZT thin film on ITO/glass substrate was about 60 % in the visible light region. The deposited transparent PZT thin film exhibited the ferroelectricity of P_r = 36.3 μC/cm^2 and E_c = 71.3 kV/cm. In addition, the piezoelectric property of the resultant PZT thin film was relatively large and exhibited the measured effective d_33 of 120 pC/N after the polarization., application/pdf},
 pages = {41--44},
 title = {Preparation and characterization of PZT thin films on ITO/glass substrate by CSD},
 volume = {301},
 year = {2006}
}