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It is found that the phase separation of the alloy films due to the silicide formation is observed in the initial stage of the reaction when the following conditions are satisfied \uff1b (i)the alloy film consists of the combination of near-noble metal and refractory metal\uff0cwhich have different reaction process with Si\uff0cin the sense that the diffusion species for the reaction of the slicide formation is metal or silicon\uff0cand(ii)the alloy doesn\u0027t form a stable intermetallic compound", "subitem_description_type": "Abstract"}]}, "item_2_full_name_3": {"attribute_name": "\u8457\u8005\u5225\u540d", "attribute_value_mlt": [{"nameIdentifiers": [{"nameIdentifier": "33709", "nameIdentifierScheme": "WEKO"}], "names": [{"name": "Mayumi, TAKEYAMA"}]}, {"nameIdentifiers": [{"nameIdentifier": "33710", "nameIdentifierScheme": "WEKO"}], "names": [{"name": "Masahide, SUZUKI"}]}, {"nameIdentifiers": [{"nameIdentifier": "33711", "nameIdentifierScheme": "WEKO"}], "names": [{"name": "Atsushi, NOYA"}]}, {"nameIdentifiers": [{"nameIdentifier": "33712", "nameIdentifierScheme": "WEKO"}], "names": [{"name": "Katsutaka, SASAKI"}]}]}, "item_2_publisher_32": {"attribute_name": "\u51fa\u7248\u8005", "attribute_value_mlt": [{"subitem_publisher": "\u5317\u898b\u5de5\u696d\u5927\u5b66"}]}, "item_2_select_15": {"attribute_name": "\u8457\u8005\u7248\u30d5\u30e9\u30b0", "attribute_value_mlt": [{"subitem_select_item": "publisher"}]}, "item_creator": {"attribute_name": "\u8457\u8005", "attribute_type": "creator", "attribute_value_mlt": [{"creatorNames": [{"creatorName": "\u6b66\u5c71, \u771f\u5f13"}], "nameIdentifiers": [{"nameIdentifier": "44855", "nameIdentifierScheme": "WEKO"}, {"nameIdentifier": "1000080236512 ", "nameIdentifierScheme": "NRID", "nameIdentifierURI": "http://rns.nii.ac.jp/d/nr/1000080236512 "}]}, {"creatorNames": [{"creatorName": "\u9234\u6728, \u96c5\u82f1"}], "nameIdentifiers": [{"nameIdentifier": "33706", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "\u91ce\u77e2, \u539a"}], "nameIdentifiers": [{"nameIdentifier": "33707", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "\u4f50\u3005\u6728, \u514b\u5b5d"}], "nameIdentifiers": [{"nameIdentifier": "33708", "nameIdentifierScheme": "WEKO"}]}]}, "item_files": {"attribute_name": "\u30d5\u30a1\u30a4\u30eb\u60c5\u5831", "attribute_type": "file", "attribute_value_mlt": [{"accessrole": "open_date", "date": [{"dateType": "Available", "dateValue": "2016-11-22"}], "displaytype": "detail", "download_preview_message": "", "file_order": 0, "filename": "24-1-2.pdf", "filesize": [{"value": "3.9 MB"}], "format": "application/pdf", "future_date_message": "", "is_thumbnail": false, "licensetype": "license_free", "mimetype": "application/pdf", "size": 3900000.0, "url": {"label": "24-1-2.pdf", "url": "https://kitami-it.repo.nii.ac.jp/record/6685/files/24-1-2.pdf"}, "version_id": "33ef9239-5135-416b-9c0b-57792bad970d"}]}, "item_language": {"attribute_name": "\u8a00\u8a9e", "attribute_value_mlt": [{"subitem_language": "jpn"}]}, "item_resource_type": {"attribute_name": "\u8cc7\u6e90\u30bf\u30a4\u30d7", "attribute_value_mlt": [{"resourcetype": "departmental bulletin paper", "resourceuri": "http://purl.org/coar/resource_type/c_6501"}]}, "item_title": "\u30aa\u30fc\u30b8\u30a8\u96fb\u5b50\u5206\u5149\u5206\u6790\u306b\u3088\u308b\u5408\u91d1\u819c\u306e\u30b7\u30ea\u30b5\u30a4\u30c9\u5f62\u6210\u521d\u671f\u904e\u7a0b\u306e\u691c\u8a0e", "item_titles": {"attribute_name": "\u30bf\u30a4\u30c8\u30eb", "attribute_value_mlt": [{"subitem_title": "\u30aa\u30fc\u30b8\u30a8\u96fb\u5b50\u5206\u5149\u5206\u6790\u306b\u3088\u308b\u5408\u91d1\u819c\u306e\u30b7\u30ea\u30b5\u30a4\u30c9\u5f62\u6210\u521d\u671f\u904e\u7a0b\u306e\u691c\u8a0e"}]}, "item_type_id": "2", "owner": "1", "path": ["7/15/45"], "permalink_uri": "https://kitami-it.repo.nii.ac.jp/records/6685", "pubdate": {"attribute_name": "\u516c\u958b\u65e5", "attribute_value": "2007-04-09"}, "publish_date": "2007-04-09", "publish_status": "0", "recid": "6685", "relation": {}, "relation_version_is_last": true, "title": ["\u30aa\u30fc\u30b8\u30a8\u96fb\u5b50\u5206\u5149\u5206\u6790\u306b\u3088\u308b\u5408\u91d1\u819c\u306e\u30b7\u30ea\u30b5\u30a4\u30c9\u5f62\u6210\u521d\u671f\u904e\u7a0b\u306e\u691c\u8a0e"], "weko_shared_id": 3}