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Optimization of Surface Layers for Suppression of Agglomeration in Ag Films
https://kitami-it.repo.nii.ac.jp/records/8464
https://kitami-it.repo.nii.ac.jp/records/8464d2852981-f5d3-474d-ba62-48d4c7dc9ee7
| 名前 / ファイル | ライセンス | アクション |
|---|---|---|
No.12-Kawamura.pdf (533.4 kB)
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| Item type | 学術雑誌論文 / Journal Article(1) | |||||
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| 公開日 | 2016-09-08 | |||||
| タイトル | ||||||
| タイトル | Optimization of Surface Layers for Suppression of Agglomeration in Ag Films | |||||
| 言語 | en | |||||
| 言語 | ||||||
| 言語 | eng | |||||
| 資源タイプ | ||||||
| 資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
| 資源タイプ | journal article | |||||
| アクセス権 | ||||||
| アクセス権 | open access | |||||
| アクセス権URI | http://purl.org/coar/access_right/c_abf2 | |||||
| 著者 |
Zhang, Ziyang
× Zhang, Ziyang× Kawamura, Midori× Abe, Yoshio× Kim, Kyung Ho |
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| 著者別名 | ||||||
| 識別子Scheme | WEKO | |||||
| 識別子 | 44880 | |||||
| 識別子Scheme | KAKEN | |||||
| 識別子URI | https://nrid.nii.ac.jp/ja/nrid/1000070261401 | |||||
| 識別子 | 70261401 | |||||
| 姓名 | 川村, みどり | |||||
| 言語 | ja | |||||
| 著者別名 | ||||||
| 識別子Scheme | WEKO | |||||
| 識別子 | 44879 | |||||
| 識別子Scheme | KAKEN | |||||
| 識別子URI | https://nrid.nii.ac.jp/ja/nrid/1000020261399 | |||||
| 識別子 | 20261399 | |||||
| 姓名 | 阿部, 良夫 | |||||
| 言語 | ja | |||||
| 著者別名 | ||||||
| 識別子Scheme | WEKO | |||||
| 識別子 | 44878 | |||||
| 識別子Scheme | KAKEN | |||||
| 識別子URI | https://nrid.nii.ac.jp/ja/nrid/1000070608471 | |||||
| 識別子 | 70608471 | |||||
| 姓名 | 金, 敬鎬 | |||||
| 言語 | ja | |||||
| 抄録 | ||||||
| 内容記述タイプ | Abstract | |||||
| 内容記述 | We previously reported that Al, Ti, and Nb surface layers can effectively suppress agglomeration in Ag films, which is dominated by the surface diffusion of Ag atoms. In this study, Ag films with Pd, Ni, and W surface layers were prepared by RF magnetron sputtering, and the properties of these films were compared with previous observations of the effects of Ti and Nb surface layers. The most important properties of the appropriate surface layers for the suppression of agglomeration in Ag films are a high cohesive energy or a high Gibbs free energy of formation of the oxide, and a low solid solubility in Ag. | |||||
| 書誌情報 |
en : Japanese Journal of Applied Physics 巻 52, 号 7, p. 078003, 発行日 2013 |
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| 権利 | ||||||
| 権利情報 | c 2013 The Japan Society of Applied Physics | |||||
| 出版者 | ||||||
| 出版者 | Japan Society of Applied Physics | |||||
| 著者版フラグ | ||||||
| 値 | author | |||||
| 出版タイプ | ||||||
| 出版タイプ | AM | |||||
| 出版タイプResource | http://purl.org/coar/version/c_ab4af688f83e57aa | |||||
