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  1. 学術雑誌掲載済論文
  2. 洋雑誌

Effects of Nb Surface and Ti Interface Layers on Thermal Stability and Electrical Resistivity of Ag Thin Films

https://kitami-it.repo.nii.ac.jp/records/8463
c91ce019-4580-4d8d-9f39-7cfb69481d3b
名前 / ファイル ライセンス アクション
No.11-Kawamura.pdf No.11-Kawamura.pdf (779.1 kB)
Item type 学術雑誌論文 / Journal Article(1)
公開日 2016-09-08
タイトル
言語 en
タイトル Effects of Nb Surface and Ti Interface Layers on Thermal Stability and Electrical Resistivity of Ag Thin Films
言語
言語 eng
資源タイプ
資源 http://purl.org/coar/resource_type/c_6501
タイプ journal article
アクセス権
アクセス権 open access
アクセス権URI http://purl.org/coar/access_right/c_abf2
著者 Zhang, Ziyang

× Zhang, Ziyang

WEKO 44610

en Zhang, Ziyang

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Kawamura, Midori

× Kawamura, Midori

WEKO 44611

en Kawamura, Midori

Search repository
Abe, Yoshio

× Abe, Yoshio

WEKO 44612

en Abe, Yoshio

Search repository
Kim, Kyung Ho

× Kim, Kyung Ho

WEKO 44613

en Kim, Kyung Ho

Search repository
著者別名
姓名
姓名 川村, みどり
言語 ja
著者別名
姓名
姓名 阿部, 良夫
言語 ja
著者別名
姓名
姓名 金, 敬鎬
言語 ja
抄録
内容記述タイプ Abstract
内容記述 Nb/Ag, Ag/Ti, and Nb/Ag/Ti films were prepared by rf magnetron sputtering to investigate the effects of the Nb surface and Ti interface layers on the thermal stability and electrical resistivity of 100-nm-thick Ag thin films. The Nb surface layer, regardless of the chemical state of metal or oxide, prevented the migration of Ag atoms during annealing, which contributed to the agglomeration suppression of Ag films. Ti interface layers not only improved the adhesion of Ag films to SiO2 substrates but also impelled the overcoated Ag atoms to arrange along the close-packed plane (111); thus, Ag/Ti films exhibited relatively good thermal stability and low resistivity. By combining the roles of the Nb surface and Ti interface layers, Nb (5 nm)/Ag (100 nm)/Ti (3 nm) films showed the highest thermal stability and the lowest resistivity. Different materials of surface and interface layers might be more effective for improving the thermal stability and electrical resistivity of Ag films.
書誌情報 en : Japanese Journal of Applied Physics

巻 51, 号 8, p. 085802, 発行日 2012
権利
権利情報 c 2012 The Japan Society of Applied Physics
出版者
出版者 Japan Society of Applied Physics
著者版フラグ
値 author
出版タイプ
出版タイプ AM
出版タイプResource http://purl.org/coar/version/c_ab4af688f83e57aa
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