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  1. 学術雑誌掲載済論文
  2. 洋雑誌

Optical and electrochromic properties of RF reactively sputtered WO_3 films

https://kitami-it.repo.nii.ac.jp/records/6901
https://kitami-it.repo.nii.ac.jp/records/6901
c7c6035d-aeb3-4dc4-a32c-07d4d9933a6f
名前 / ファイル ライセンス アクション
4593.pdf 4593.pdf (542.4 kB)
Item type 学術雑誌論文 / Journal Article(1)
公開日 2007-04-19
タイトル
言語 en
タイトル Optical and electrochromic properties of RF reactively sputtered WO_3 films
言語
言語 eng
資源タイプ
資源 http://purl.org/coar/resource_type/c_6501
タイプ journal article
アクセス権
アクセス権 open access
アクセス権URI http://purl.org/coar/access_right/c_abf2
著者 Washizu, E.

× Washizu, E.

WEKO 34904

en Washizu, E.

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Yamamoto, A.

× Yamamoto, A.

WEKO 34905

en Yamamoto, A.

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Abe, Y.

× Abe, Y.

WEKO 34906

en Abe, Y.

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Kawamura, M.

× Kawamura, M.

WEKO 34907

en Kawamura, M.

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Sasaki, K.

× Sasaki, K.

WEKO 34908

en Sasaki, K.

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著者別名
姓名 阿部, 良夫
言語 ja
著者別名
姓名 川村, みどり
言語 ja
著者別名
姓名 佐々木, 克孝
言語 ja
抄録
内容記述タイプ Abstract
内容記述 The effects of deposition conditions, including substrate temperature and sputtering gas pressure, on the optical and electrochromic (EC) properties of WO_3 films prepared by RF reactive sputtering were investigated. The maximum optical band gap energy of 3.15 eV was obtained on a room-temperature substrate temperature, and decreased with increasing substrate temperature. However, the maximum refractive index of about 2.5 was obtained at a sputtering gas pressure of 5 mTorr and a substrate temperature of 500°C, and decreased with decreasing substrate temperature and with increasing pressure. The decrease in bandgap energy and refractive index are thought to have been caused by an increase in WO_3 cluster size and a decrease in film density, respectively. Electrochromic (EC) response times of the WO_3 films were measured in an electrolyte of 1N H_2SO_4 aqueous solution. Fast EC responses were obtained for the WO_3 films with wide band gap energies and low refractive indices. The results indicate that the optical properties of WO_3 films are useful indicators of EC response.
書誌情報 Solid State Ionics

巻 165, 号 1-4, p. 175-180, 発行日 2003-12
DOI
識別子タイプ DOI
関連識別子 http://doi.org/10.1016/j.ssi.2003.08.030
権利
権利情報 http://www.sciencedirect.com/science/journal/01672738
権利
権利情報 Elsevier B.V., E. Washizu, A. Yamamoto, Y. Abe, M. Kawamura and K. Sasaki, Solid State Ionics, 165(1-4), 2003, 175-180.
フォーマット
内容記述タイプ Other
内容記述 application/pdf
出版者
出版者 Elsevier
著者版フラグ
値 author
出版タイプ
出版タイプ AM
出版タイプResource http://purl.org/coar/version/c_ab4af688f83e57aa
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