Item type |
学術雑誌論文 / Journal Article(1) |
公開日 |
2007-04-19 |
タイトル |
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タイトル |
Optical and electrochromic properties of RF reactively sputtered WO_3 films |
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言語 |
en |
言語 |
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言語 |
eng |
資源タイプ |
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資源 |
http://purl.org/coar/resource_type/c_6501 |
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タイプ |
journal article |
アクセス権 |
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アクセス権 |
open access |
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アクセス権URI |
http://purl.org/coar/access_right/c_abf2 |
著者 |
Washizu, E.
Yamamoto, A.
Abe, Y.
Kawamura, M.
Sasaki, K.
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著者別名 |
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識別子Scheme |
WEKO |
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識別子 |
44879 |
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識別子Scheme |
KAKEN |
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識別子URI |
https://nrid.nii.ac.jp/ja/nrid/1000020261399 |
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識別子 |
20261399 |
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姓名 |
阿部, 良夫 |
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言語 |
ja |
著者別名 |
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識別子Scheme |
WEKO |
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識別子 |
44880 |
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識別子Scheme |
KAKEN |
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識別子URI |
https://nrid.nii.ac.jp/ja/nrid/1000070261401 |
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識別子 |
70261401 |
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姓名 |
川村, みどり |
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言語 |
ja |
著者別名 |
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識別子Scheme |
WEKO |
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識別子 |
34911 |
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姓名 |
佐々木, 克孝 |
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言語 |
ja |
抄録 |
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内容記述タイプ |
Abstract |
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内容記述 |
The effects of deposition conditions, including substrate temperature and sputtering gas pressure, on the optical and electrochromic (EC) properties of WO_3 films prepared by RF reactive sputtering were investigated. The maximum optical band gap energy of 3.15 eV was obtained on a room-temperature substrate temperature, and decreased with increasing substrate temperature. However, the maximum refractive index of about 2.5 was obtained at a sputtering gas pressure of 5 mTorr and a substrate temperature of 500°C, and decreased with decreasing substrate temperature and with increasing pressure. The decrease in bandgap energy and refractive index are thought to have been caused by an increase in WO_3 cluster size and a decrease in film density, respectively. Electrochromic (EC) response times of the WO_3 films were measured in an electrolyte of 1N H_2SO_4 aqueous solution. Fast EC responses were obtained for the WO_3 films with wide band gap energies and low refractive indices. The results indicate that the optical properties of WO_3 films are useful indicators of EC response. |
書誌情報 |
Solid State Ionics
巻 165,
号 1-4,
p. 175-180,
発行日 2003-12
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DOI |
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識別子タイプ |
DOI |
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関連識別子 |
http://doi.org/10.1016/j.ssi.2003.08.030 |
権利 |
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権利情報 |
http://www.sciencedirect.com/science/journal/01672738 |
権利 |
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権利情報 |
Elsevier B.V., E. Washizu, A. Yamamoto, Y. Abe, M. Kawamura and K. Sasaki, Solid State Ionics, 165(1-4), 2003, 175-180. |
フォーマット |
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内容記述タイプ |
Other |
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内容記述 |
application/pdf |
出版者 |
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出版者 |
Elsevier |
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言語 |
en |
著者版フラグ |
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言語 |
en |
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値 |
author |
出版タイプ |
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出版タイプ |
AM |
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出版タイプResource |
http://purl.org/coar/version/c_ab4af688f83e57aa |