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Optical and electrochromic properties of RF reactively sputtered WO_3 films
https://kitami-it.repo.nii.ac.jp/records/6901
https://kitami-it.repo.nii.ac.jp/records/6901c7c6035d-aeb3-4dc4-a32c-07d4d9933a6f
名前 / ファイル | ライセンス | アクション |
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Item type | 学術雑誌論文 / Journal Article(1) | |||||
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公開日 | 2007-04-19 | |||||
タイトル | ||||||
言語 | en | |||||
タイトル | Optical and electrochromic properties of RF reactively sputtered WO_3 films | |||||
言語 | ||||||
言語 | eng | |||||
資源タイプ | ||||||
資源 | http://purl.org/coar/resource_type/c_6501 | |||||
タイプ | journal article | |||||
アクセス権 | ||||||
アクセス権 | open access | |||||
アクセス権URI | http://purl.org/coar/access_right/c_abf2 | |||||
著者 |
Washizu, E.
× Washizu, E.× Yamamoto, A.× Abe, Y.× Kawamura, M.× Sasaki, K. |
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著者別名 | ||||||
姓名 | 阿部, 良夫 | |||||
言語 | ja | |||||
著者別名 | ||||||
姓名 | 川村, みどり | |||||
言語 | ja | |||||
著者別名 | ||||||
姓名 | 佐々木, 克孝 | |||||
言語 | ja | |||||
抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | The effects of deposition conditions, including substrate temperature and sputtering gas pressure, on the optical and electrochromic (EC) properties of WO_3 films prepared by RF reactive sputtering were investigated. The maximum optical band gap energy of 3.15 eV was obtained on a room-temperature substrate temperature, and decreased with increasing substrate temperature. However, the maximum refractive index of about 2.5 was obtained at a sputtering gas pressure of 5 mTorr and a substrate temperature of 500°C, and decreased with decreasing substrate temperature and with increasing pressure. The decrease in bandgap energy and refractive index are thought to have been caused by an increase in WO_3 cluster size and a decrease in film density, respectively. Electrochromic (EC) response times of the WO_3 films were measured in an electrolyte of 1N H_2SO_4 aqueous solution. Fast EC responses were obtained for the WO_3 films with wide band gap energies and low refractive indices. The results indicate that the optical properties of WO_3 films are useful indicators of EC response. | |||||
書誌情報 |
Solid State Ionics 巻 165, 号 1-4, p. 175-180, 発行日 2003-12 |
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DOI | ||||||
識別子タイプ | DOI | |||||
関連識別子 | http://doi.org/10.1016/j.ssi.2003.08.030 | |||||
権利 | ||||||
権利情報 | http://www.sciencedirect.com/science/journal/01672738 | |||||
権利 | ||||||
権利情報 | Elsevier B.V., E. Washizu, A. Yamamoto, Y. Abe, M. Kawamura and K. Sasaki, Solid State Ionics, 165(1-4), 2003, 175-180. | |||||
フォーマット | ||||||
内容記述タイプ | Other | |||||
内容記述 | application/pdf | |||||
出版者 | ||||||
出版者 | Elsevier | |||||
著者版フラグ | ||||||
値 | author | |||||
出版タイプ | ||||||
出版タイプ | AM | |||||
出版タイプResource | http://purl.org/coar/version/c_ab4af688f83e57aa |