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  1. 学術雑誌掲載済論文
  2. 洋雑誌

Orientation of metal films deposited by sputtering using Ar/N_2 gas mixtures

https://kitami-it.repo.nii.ac.jp/records/6899
ed6899fc-b4e0-441c-8031-c7839c7ffe5a
名前 / ファイル ライセンス アクション
4636.pdf 4636.pdf (218.4 kB)
Item type 学術雑誌論文 / Journal Article(1)
公開日 2007-04-19
タイトル
言語 en
タイトル Orientation of metal films deposited by sputtering using Ar/N_2 gas mixtures
言語
言語 eng
資源タイプ
資源 http://purl.org/coar/resource_type/c_6501
タイプ journal article
アクセス権
アクセス権 open access
アクセス権URI http://purl.org/coar/access_right/c_abf2
著者 Kawamura, Midori

× Kawamura, Midori

WEKO 34892

en Kawamura, Midori

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Abe, Yoshio

× Abe, Yoshio

WEKO 34893

en Abe, Yoshio

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Sasaki, Katsutaka

× Sasaki, Katsutaka

WEKO 34894

en Sasaki, Katsutaka

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著者別名
姓名
姓名 川村, みどり
言語 ja
著者別名
姓名
姓名 阿部, 良夫
言語 ja
著者別名
姓名
姓名 佐々木, 克孝
言語 ja
抄録
内容記述タイプ Abstract
内容記述 The influence of adding N_2 to the sputtering gas on the crystal orientation of metal films was investigated. We observed a crystal orientation change of Ni films from (111) to (100) upon the addition of N_2 into the sputtering gas. The increase of substrate temperature resulted in higher degree of orientation of Ni films. Applying a similar deposition condition, Ag and Cu films were also deposited. However, no change was observed for Ag films. Cu films deposited at room temperature showed orientation change but the crystallinity became poor due to the incorporation of nitrogen. It is considered that the difference in the influence of N_2 addition is a result of the strength of interaction between nitrogen and metals. We must determine the suitable deposition conditions for the orientation change.
書誌情報 Thin Solid Films

巻 469-470, p. 491-494, 発行日 2004-12
DOI
関連識別子
識別子タイプ DOI
関連識別子 http://doi.org/10.1016/j.tsf.2004.06.175
権利
権利情報 http://www.sciencedirect.com/science/journal/00406090
権利
権利情報 Elsevier B.V., Midori Kawamura, Yoshio Abe and Katsutaka Sasaki, Thin Solid Films, 469-470, 2004, 491-494.
フォーマット
内容記述タイプ Other
内容記述 application/pdf
出版者
出版者 Elsevier
著者版フラグ
値 author
出版タイプ
出版タイプ AM
出版タイプResource http://purl.org/coar/version/c_ab4af688f83e57aa
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