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{"_buckets": {"deposit": "2cabf78b-517f-4949-8d31-7452872f55ad"}, "_deposit": {"id": "6473", "owners": [], "pid": {"revision_id": 0, "type": "depid", "value": "6473"}, "status": "published"}, "_oai": {"id": "oai:kitami-it.repo.nii.ac.jp:00006473"}, "item_2_alternative_title_18": {"attribute_name": "\u305d\u306e\u4ed6\u306e\u30bf\u30a4\u30c8\u30eb", "attribute_value_mlt": [{"subitem_alternative_title": "Dielectric Properties of Oxides Prepared by Anodizing Nb-Ta Mixed Films"}]}, "item_2_biblio_info_6": {"attribute_name": "\u66f8\u8a8c\u60c5\u5831", "attribute_value_mlt": [{"bibliographicIssueDates": {"bibliographicIssueDate": "1979-03", "bibliographicIssueDateType": "Issued"}, "bibliographicIssueNumber": "2", "bibliographicPageEnd": "211", "bibliographicPageStart": "203", "bibliographicVolumeNumber": "10", "bibliographic_titles": [{"bibliographic_title": "\u5317\u898b\u5de5\u696d\u5927\u5b66\u7814\u7a76\u5831\u544a"}]}]}, "item_2_description_14": {"attribute_name": "\u30d5\u30a9\u30fc\u30de\u30c3\u30c8", "attribute_value_mlt": [{"subitem_description": "application/pdf", "subitem_description_type": "Other"}]}, "item_2_description_4": {"attribute_name": "\u6284\u9332", "attribute_value_mlt": [{"subitem_description": "Nb-Ta mixed thin films prepared by DC sputtering were anodized for the purpose of extending the properties of tantalum thin film capacitor. Dielectric properties (capacitance, tan\u2202and temperature coefficient of capacitance) were investigated as a function of tantalum contents in mixed films. For the determination of thickness of anodic oxide films, sputter ecthing of the anodized films has been carried out varying ecthing times. The thickness obtained by the sputter ecthing method was compared with the values calculated according to Gerstenberg\u2019s equation. It is reasonable to say that the agreements between both values are fairly good, taking into account the measurement errors of interferometric method. Dielectric constants of mixed anodic oxide films calculated by Wagner\u2019s theory were compared with the values obtained from measured values of oxide thickness and capacitance. The agreements are also good. Therefore, we can conclude that mixed anodic oxide films in this work are very uniform and have ideally mixed structure. Furthermore, it is seen that the value of dielectric constant can be changed from 33 to 26 by changing tantalum contents in mixed films, above the region of 50 atm. \uff05, maintaining constant value of tan \u2202below 0.01.", "subitem_description_type": "Abstract"}]}, "item_2_full_name_3": {"attribute_name": "\u8457\u8005\u5225\u540d", "attribute_value_mlt": [{"nameIdentifiers": [{"nameIdentifier": "32726", "nameIdentifierScheme": "WEKO"}], "names": [{"name": "Shigeyoshi, OIWAKE"}]}, {"nameIdentifiers": [{"nameIdentifier": "32727", "nameIdentifierScheme": "WEKO"}], "names": [{"name": "Toshiji, UMEZAWA"}]}]}, "item_2_publisher_32": {"attribute_name": "\u51fa\u7248\u8005", "attribute_value_mlt": [{"subitem_publisher": "\u5317\u898b\u5de5\u696d\u5927\u5b66"}]}, "item_2_select_15": {"attribute_name": "\u8457\u8005\u7248\u30d5\u30e9\u30b0", "attribute_value_mlt": [{"subitem_select_item": "publisher"}]}, "item_creator": {"attribute_name": "\u8457\u8005", "attribute_type": "creator", "attribute_value_mlt": [{"creatorNames": [{"creatorName": "\u4f50\u3005\u6728, \u514b\u5b5d"}], "nameIdentifiers": [{"nameIdentifier": "32724", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "\u6885\u6ca2, \u5229\u4e8c"}], "nameIdentifiers": [{"nameIdentifier": "32725", "nameIdentifierScheme": "WEKO"}]}]}, "item_files": {"attribute_name": "\u30d5\u30a1\u30a4\u30eb\u60c5\u5831", "attribute_type": "file", "attribute_value_mlt": [{"accessrole": "open_date", "date": [{"dateType": "Available", "dateValue": "2016-11-22"}], "displaytype": "detail", "download_preview_message": "", "file_order": 0, "filename": "10-2-6.pdf", "filesize": [{"value": "3.7 MB"}], "format": "application/pdf", "future_date_message": "", "is_thumbnail": false, "licensetype": "license_free", "mimetype": "application/pdf", "size": 3700000.0, "url": {"label": "10-2-6.pdf", "url": "https://kitami-it.repo.nii.ac.jp/record/6473/files/10-2-6.pdf"}, "version_id": "cfe54670-e4df-48d7-82c1-4b913269dc16"}]}, "item_language": {"attribute_name": "\u8a00\u8a9e", "attribute_value_mlt": [{"subitem_language": "jpn"}]}, "item_resource_type": {"attribute_name": "\u8cc7\u6e90\u30bf\u30a4\u30d7", "attribute_value_mlt": [{"resourcetype": "departmental bulletin paper", "resourceuri": "http://purl.org/coar/resource_type/c_6501"}]}, "item_title": "Nb-Ta\u306e\u967d\u6975\u9178\u5316\u819c\u306e\u8a98\u96fb\u7279\u6027*", "item_titles": {"attribute_name": "\u30bf\u30a4\u30c8\u30eb", "attribute_value_mlt": [{"subitem_title": "Nb-Ta\u306e\u967d\u6975\u9178\u5316\u819c\u306e\u8a98\u96fb\u7279\u6027*"}]}, "item_type_id": "2", "owner": "1", "path": ["7/15/31"], "permalink_uri": "https://kitami-it.repo.nii.ac.jp/records/6473", "pubdate": {"attribute_name": "\u516c\u958b\u65e5", "attribute_value": "2007-04-09"}, "publish_date": "2007-04-09", "publish_status": "0", "recid": "6473", "relation": {}, "relation_version_is_last": true, "title": ["Nb-Ta\u306e\u967d\u6975\u9178\u5316\u819c\u306e\u8a98\u96fb\u7279\u6027*"], "weko_shared_id": 3}
  1. 紀要掲載論文
  2. 北見工業大学研究報告
  3. Vol.10

Nb-Taの陽極酸化膜の誘電特性*

https://kitami-it.repo.nii.ac.jp/records/6473
ad20d0af-9530-452d-8a5e-b19bdbf20e7f
名前 / ファイル ライセンス アクション
10-2-6.pdf 10-2-6.pdf (3.7 MB)
Item type 紀要論文 / Departmental Bulletin Paper(1)
公開日 2007-04-09
タイトル
タイトル Nb-Taの陽極酸化膜の誘電特性*
言語
言語 jpn
資源タイプ
資源 http://purl.org/coar/resource_type/c_6501
タイプ departmental bulletin paper
その他のタイトル
その他のタイトル Dielectric Properties of Oxides Prepared by Anodizing Nb-Ta Mixed Films
著者 佐々木, 克孝

× 佐々木, 克孝

WEKO 32724

佐々木, 克孝

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梅沢, 利二

× 梅沢, 利二

WEKO 32725

梅沢, 利二

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著者別名
識別子
識別子 32726
識別子Scheme WEKO
姓名
姓名 Shigeyoshi, OIWAKE
著者別名
識別子
識別子 32727
識別子Scheme WEKO
姓名
姓名 Toshiji, UMEZAWA
抄録
内容記述タイプ Abstract
内容記述 Nb-Ta mixed thin films prepared by DC sputtering were anodized for the purpose of extending the properties of tantalum thin film capacitor. Dielectric properties (capacitance, tan∂and temperature coefficient of capacitance) were investigated as a function of tantalum contents in mixed films. For the determination of thickness of anodic oxide films, sputter ecthing of the anodized films has been carried out varying ecthing times. The thickness obtained by the sputter ecthing method was compared with the values calculated according to Gerstenberg’s equation. It is reasonable to say that the agreements between both values are fairly good, taking into account the measurement errors of interferometric method. Dielectric constants of mixed anodic oxide films calculated by Wagner’s theory were compared with the values obtained from measured values of oxide thickness and capacitance. The agreements are also good. Therefore, we can conclude that mixed anodic oxide films in this work are very uniform and have ideally mixed structure. Furthermore, it is seen that the value of dielectric constant can be changed from 33 to 26 by changing tantalum contents in mixed films, above the region of 50 atm. %, maintaining constant value of tan ∂below 0.01.
書誌情報 北見工業大学研究報告

巻 10, 号 2, p. 203-211, 発行日 1979-03
フォーマット
内容記述タイプ Other
内容記述 application/pdf
著者版フラグ
値 publisher
出版者
出版者 北見工業大学
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