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F Reactive Sputtering"}]}, "item_2_biblio_info_6": {"attribute_name": "\u66f8\u8a8c\u60c5\u5831", "attribute_value_mlt": [{"bibliographicIssueDates": {"bibliographicIssueDate": "1976-06", "bibliographicIssueDateType": "Issued"}, "bibliographicIssueNumber": "2", "bibliographicPageEnd": "303", "bibliographicPageStart": "289", "bibliographicVolumeNumber": "7", "bibliographic_titles": [{"bibliographic_title": "\u5317\u898b\u5de5\u696d\u5927\u5b66\u7814\u7a76\u5831\u544a"}]}]}, "item_2_description_14": {"attribute_name": "\u30d5\u30a9\u30fc\u30de\u30c3\u30c8", "attribute_value_mlt": [{"subitem_description": "application/pdf", "subitem_description_type": "Other"}]}, "item_2_description_4": {"attribute_name": "\u6284\u9332", "attribute_value_mlt": [{"subitem_description": "Mixed dielectric thin films of a Ta-Ti-O system were prepared by R. F. reactive sputtering from the composite targets, which were given several different area ratios, in the sputtering gas of argon-oxygen\uff0815%\uff09mixture.\u3000\u3000\u3000The value of the dielectric constant was varied almost linearly from 30 to 70 with increased Ti area ratios\u3001but that of dielectric loss remained less than 0.04. The addition of a Ta-O system into the Ti?O system markedly improved frequency characteristics of the dielectric constant and loss, and also decreased\u3000the\u3000magnitude of\u3000the leakage current.\u3000\u3000\u3000The structural properties were\u3000investigated by electron diffraction and the results showed that the Ta-Ti-O system included only an amorphous Ti-O system and a polycrystalline Ta-O system.\u3000\u3000\u3000The investigation of the conduction through this dielectric thin films showed that the mechanism was due to the Pool-Frenkel effect.", "subitem_description_type": "Abstract"}]}, "item_2_full_name_3": {"attribute_name": "\u8457\u8005\u5225\u540d", "attribute_value_mlt": [{"nameIdentifiers": [{"nameIdentifier": "32423", "nameIdentifierScheme": "WEKO"}], "names": [{"name": "UMEZAWA, Toshiji"}]}, {"nameIdentifiers": [{"nameIdentifier": "32424", "nameIdentifierScheme": "WEKO"}], "names": [{"name": "YAJIMA, Shozo"}]}]}, "item_2_publisher_32": {"attribute_name": "\u51fa\u7248\u8005", "attribute_value_mlt": [{"subitem_publisher": "\u5317\u898b\u5de5\u696d\u5927\u5b66"}]}, "item_2_select_15": {"attribute_name": "\u8457\u8005\u7248\u30d5\u30e9\u30b0", "attribute_value_mlt": [{"subitem_select_item": "publisher"}]}, "item_creator": {"attribute_name": "\u8457\u8005", "attribute_type": "creator", "attribute_value_mlt": [{"creatorNames": [{"creatorName": "\u6885\u6ca2, \u5229\u4e8c"}], "nameIdentifiers": [{"nameIdentifier": "32421", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "\u77e2\u5cf6, \u662d\u4e09"}], "nameIdentifiers": [{"nameIdentifier": "32422", "nameIdentifierScheme": "WEKO"}]}]}, "item_files": {"attribute_name": "\u30d5\u30a1\u30a4\u30eb\u60c5\u5831", "attribute_type": "file", "attribute_value_mlt": [{"accessrole": "open_date", "date": [{"dateType": "Available", "dateValue": "2016-11-22"}], "displaytype": "detail", "download_preview_message": "", "file_order": 0, "filename": "7-2-4.pdf", "filesize": [{"value": "6.2 MB"}], "format": "application/pdf", "future_date_message": "", "is_thumbnail": false, "licensetype": "license_free", "mimetype": "application/pdf", "size": 6200000.0, "url": {"label": "7-2-4.pdf", "url": "https://kitami-it.repo.nii.ac.jp/record/6393/files/7-2-4.pdf"}, "version_id": "1b76714f-e963-4b78-b286-f1d1d966ab3b"}]}, "item_language": {"attribute_name": "\u8a00\u8a9e", "attribute_value_mlt": [{"subitem_language": "jpn"}]}, "item_resource_type": {"attribute_name": "\u8cc7\u6e90\u30bf\u30a4\u30d7", "attribute_value_mlt": [{"resourcetype": "departmental bulletin paper", "resourceuri": "http://purl.org/coar/resource_type/c_6501"}]}, "item_title": "R\uff0eF\uff0e\u30ea\u30a2\u30af\u30c6\u30a3\u30d6\uff65\u30b9\u30d1\u30c3\u30bf\u6cd5\u306b\u3088\u308bTa-Ti-O\u7cfb\u6df7\u5408\u8a98\u96fb\u4f53\u8584\u819c", "item_titles": {"attribute_name": "\u30bf\u30a4\u30c8\u30eb", "attribute_value_mlt": [{"subitem_title": "R\uff0eF\uff0e\u30ea\u30a2\u30af\u30c6\u30a3\u30d6\uff65\u30b9\u30d1\u30c3\u30bf\u6cd5\u306b\u3088\u308bTa-Ti-O\u7cfb\u6df7\u5408\u8a98\u96fb\u4f53\u8584\u819c"}]}, "item_type_id": "2", "owner": "1", "path": ["7/15/23"], "permalink_uri": "https://kitami-it.repo.nii.ac.jp/records/6393", "pubdate": {"attribute_name": "\u516c\u958b\u65e5", "attribute_value": "2007-04-09"}, "publish_date": "2007-04-09", "publish_status": "0", "recid": "6393", "relation": {}, "relation_version_is_last": true, "title": ["R\uff0eF\uff0e\u30ea\u30a2\u30af\u30c6\u30a3\u30d6\uff65\u30b9\u30d1\u30c3\u30bf\u6cd5\u306b\u3088\u308bTa-Ti-O\u7cfb\u6df7\u5408\u8a98\u96fb\u4f53\u8584\u819c"], "weko_shared_id": 3}