@article{oai:kitami-it.repo.nii.ac.jp:00008703,
 author = {Shibata, Hiroyuki and Hiraki, Tatsurou and Tsuchizawa, Tai and Yamada, Koji and Tokura, Yasuhiro and Matsuo, Sinji},
 journal = {Superconductor Science and Technology},
 month = {Jan},
 note = {We report a high system-detection-efficiency superconducting nanowire single-photon detector (SNSPD) with a spot-size converter (SSC) on a Si photonics platform. The NbNSNSPD is evanescently coupled to the Si waveguide and connected to the optical fibre through the low-loss SSC comprising a Si inverse taper and large silica-based core. The fabricated SNSPD chip was assembled on a low-loss fibre-coupled module. The fibrecoupling loss of the module is remarkably small (1.9 dB/facet). The fabricated SNSPD module shows system detection efficiency of 32% with the dark count rate of 95 Hz and
timing jitter of 75 ps. The measured system detection efficiency is over ten times larger than that of previous waveguide-integrated SNSPDs on the Si platform. The noise equivalent power (NEP) reaches 3.6 × 10-18 WHz-1/2, and the figure of merit (FOM) reaches 1.9 × 108.},
 title = {A waveguide-integrated superconducting nanowire single-photon detector with a spot-size converter on a Si photonics platform},
 volume = {32},
 year = {2019}
}