@article{oai:kitami-it.repo.nii.ac.jp:00008431,
 author = {Sugisaka, Jun-ichiro and Yasui, Takashi and Hirayama, Koichi},
 issue = {5},
 journal = {Journal of the Optical Society of America A},
 month = {May},
 note = {We expand the difference-field boundary element method (DFBEM) to calculate wave scattering from a variety of local periodic structure defects. The DFBEM is a numerical method for simulating the diffraction caused by a periodic surface-relief structure with a defect. Although it is more efficient than conventional techniques such as the finite-difference time-domain (FDTD) method, the original DFBEM is limited to projection defects. Here, we derive the integral equations and expressions for crack and buried-pillar defects, and also demonstrate some numerical analyses, validating the results by comparison with results from the FDTD method and the dielectric interface boundary conditions.},
 pages = {751--763},
 title = {Expansion of the difference-field boundary element method for numerical analyses of various local defects in periodic surface-relief structures},
 volume = {32},
 year = {2015}
}