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  1. 学術雑誌掲載済論文
  2. 和雑誌

透過回折X線を利用した極薄板の応力測定法

https://kitami-it.repo.nii.ac.jp/records/7966
d745a6e6-d874-4a17-88f0-fafae8355f9b
名前 / ファイル ライセンス アクション
2007.07_透過回折X線を利用した極薄板の応力測定法 2007.07_透過回折X線を利用した極薄板の応力測定法 .pdf (663.8 kB)
Item type 学術雑誌論文 / Journal Article(1)
公開日 2015-09-08
タイトル
言語 ja
タイトル 透過回折X線を利用した極薄板の応力測定法
タイトル
言語 en
タイトル New Stress Measurement Method of Thin Plate Using Transmission Dffracted X-Rays
言語
言語 jpn
キーワード
主題Scheme Other
主題 Thin plate
キーワード
主題Scheme Other
主題 Transmission diffracted X-rays
キーワード
主題Scheme Other
主題 Strain measurement
キーワード
主題Scheme Other
主題 Principal stress
キーワード
主題Scheme Other
主題 Nondestructive evaluation
資源タイプ
資源 http://purl.org/coar/resource_type/c_6501
タイプ journal article
アクセス権
アクセス権 open access
アクセス権URI http://purl.org/coar/access_right/c_abf2
その他のタイトル
その他のタイトル New Stress Measurement Method of Thin Plate Using Transmission Dffracted X-Rays
著者 柴野, 純一

× 柴野, 純一

WEKO 44813
KAKEN 60206141

ja 柴野, 純一

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小林, 道明

× 小林, 道明

WEKO 41274

ja 小林, 道明

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三浦, 節男

× 三浦, 節男

WEKO 41275

ja 三浦, 節男

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平田, 智之

× 平田, 智之

WEKO 41276

ja 平田, 智之

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西川, 真弘

× 西川, 真弘

WEKO 41277

ja 西川, 真弘

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著者別名
姓名
姓名 SHIBANO, Jun-ichi
言語 en
著者別名
姓名
姓名 KOBAYASHI, Michiaki
言語 en
著者別名
姓名
姓名 MIURA, Setsuo
言語 en
著者別名
姓名
姓名 HIRATA, Tomoyuki
言語 en
著者別名
姓名
姓名 NISHIKAWA, Masahiro
言語 en
抄録
内容記述タイプ Abstract
内容記述 Residual stresses which occur in a thin plate and a film of both MEMS and an electric device have become a direct cause of a deformation and a destruction of them. To evaluate the residual stress is therefore very important for improving their mechanical reliability. A strain gauge is often incapable of using to measure the strain of the thin plate and the film, while X-ray diffraction method is effective in the nondestructive measurement of residual stress of them. If a diffracted X-ray transmitted through the thin plate is available, spacing of the lattice plane orthogonal to the direction along the surface could be measured directly. It suggests potentiality for the strain measurement of thin plate with high precision and efficiency. This paper presents a new measurement method of the stress in a polycrystalline thin plate by using transmission diffracted X-rays. This method is able to determine the principal stress and its direction in the thin plate from the measurement of the lattice spacing with random three directions within thin plate and the vertical direction of thin plate surface. The method was verified using a pure aluminum thin plate of 50μm thickness which was loaded with tension using compact tensile loading equipment. The X-ray elastic modulus of Al(311) lattice plane which was measured at the start of the experiment was derived as Young's modulus of 61.7GPa and Poisson's ratio of 0.33. As a result, principal stress and its direction in the aluminum thin plate could be evaluated with errors of less than about 9MPa and 3degree, respectively. It was confirmed that this method is effective for the stress measurement of thin plate.
書誌情報 材料

巻 56, 号 7, p. 629-634, 発行日 2007-07
DOI
関連識別子
識別子タイプ DOI
関連識別子 http://doi.org/10.2472/jsms.56.629
権利
権利情報 c 2007 公益社団法人日本材料学会
出版者
出版者 公益社団法人日本材料学会
関連サイト
URL https://www.jstage.jst.go.jp/article/jsms/56/7/56_7_629/_article/-char/ja/
著者版フラグ
値 publisher
出版タイプ
出版タイプ VoR
出版タイプResource http://purl.org/coar/version/c_970fb48d4fbd8a85
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