{"created":"2021-03-01T05:59:52.083024+00:00","id":7413,"links":{},"metadata":{"_buckets":{"deposit":"5791f580-d6b8-4326-9ca9-10b3d0b81721"},"_deposit":{"created_by":188,"id":"7413","owners":[188],"pid":{"revision_id":0,"type":"depid","value":"7413"},"status":"published"},"_oai":{"id":"oai:kitami-it.repo.nii.ac.jp:00007413","sets":["1:86"]},"author_link":["37953","37958","37961","37956","37962","37952","37957","44880","37959","44879","37960","37951"],"item_1646810750418":{"attribute_name":"出版タイプ","attribute_value_mlt":[{"subitem_version_resource":"http://purl.org/coar/version/c_970fb48d4fbd8a85","subitem_version_type":"VoR"}]},"item_3_biblio_info_186":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"1999-10","bibliographicIssueDateType":"Issued"},"bibliographicIssueNumber":"10","bibliographicPageEnd":"550","bibliographicPageStart":"543","bibliographicVolumeNumber":"J82-C-II","bibliographic_titles":[{"bibliographic_title":"電子情報通信学会論文誌"}]}]},"item_3_description_184":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"陽極酸化膜を用いて薄膜キャパシタを作製する際，弁金属からなる化学量論的で低抵抗な金属間化合物を適用することで，高耐熱で高信頼性の陽極酸化膜キャパシタが実現できるものと期待される。そこでZrとAlの組合せに着目して，熱的に安定で化学量論的なAl3Zr金属間化合物の陽極酸化膜キャパシタを作製し，キャパシタ特性や周波数特性及び漏れ電流特性を，酸化膜厚の低減効果と耐熱性の関連において検討した。その結果，本研究で用いたAl3Zr陽極酸化膜は，低損失，高耐熱でかつ酸化膜厚の薄層化が可能であり，高信頼性薄膜キャパシタ用の誘電体材料として極めて有望なことがわかった。したがって，弁金属の組合せによる化学量論的な金属間化合物を陽極酸化膜キャパシタの原材料とする着想は，薄膜キャパシタを作製する上で，有用な材料設計指針といえる。","subitem_description_language":"ja","subitem_description_type":"Abstract"}]},"item_3_description_185":{"attribute_name":"内容記述","attribute_value_mlt":[{"subitem_description":"Copyright (c) by IEICE \n許諾番号：09RC0078\nIEICE Transactions Online :\nhttp://search.ieice.org/index.html","subitem_description_language":"ja","subitem_description_type":"Other"}]},"item_3_description_194":{"attribute_name":"フォーマット","attribute_value_mlt":[{"subitem_description":"application/pdf","subitem_description_type":"Other"}]},"item_3_full_name_183":{"attribute_name":"著者別名","attribute_value_mlt":[{"nameIdentifiers":[{"nameIdentifier":"37957","nameIdentifierScheme":"WEKO"}],"names":[{"name":"Inada, Haruhisa","nameLang":"en"}]},{"nameIdentifiers":[{"nameIdentifier":"37958","nameIdentifierScheme":"WEKO"}],"names":[{"name":"Yamane, Misao","nameLang":"en"}]},{"nameIdentifiers":[{"nameIdentifier":"37959","nameIdentifierScheme":"WEKO"}],"names":[{"name":"Sasaki, Katsutaka","nameLang":"en"}]},{"nameIdentifiers":[{"nameIdentifier":"37960","nameIdentifierScheme":"WEKO"}],"names":[{"name":"Abe, Yoshio","nameLang":"en"}]},{"nameIdentifiers":[{"nameIdentifier":"37961","nameIdentifierScheme":"WEKO"}],"names":[{"name":"Kawamura, Midori","nameLang":"en"}]},{"nameIdentifiers":[{"nameIdentifier":"37962","nameIdentifierScheme":"WEKO"}],"names":[{"name":"Yanagisawa, Hideto","nameLang":"en"}]}]},"item_3_publisher_212":{"attribute_name":"出版者","attribute_value_mlt":[{"subitem_publisher":"社団法人 電子情報通信学会","subitem_publisher_language":"ja"}]},"item_3_select_195":{"attribute_name":"著者版フラグ","attribute_value_mlt":[{"subitem_select_item":"publisher","subitem_select_language":"en"}]},"item_access_right":{"attribute_name":"アクセス権","attribute_value_mlt":[{"subitem_access_right":"open access","subitem_access_right_uri":"http://purl.org/coar/access_right/c_abf2"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"稲田, 晴久","creatorNameLang":"ja"}],"nameIdentifiers":[{"nameIdentifier":"37951","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"山根, 美佐雄","creatorNameLang":"ja"}],"nameIdentifiers":[{"nameIdentifier":"37952","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"佐々木, 克孝","creatorNameLang":"ja"}],"nameIdentifiers":[{"nameIdentifier":"37953","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"阿部, 良夫","creatorNameLang":"ja"}],"nameIdentifiers":[{"nameIdentifier":"44879","nameIdentifierScheme":"WEKO"},{"nameIdentifier":"20261399","nameIdentifierScheme":"KAKEN - 研究者検索","nameIdentifierURI":"https://nrid.nii.ac.jp/ja/nrid/1000020261399"}]},{"creatorAffiliations":[{"affiliationNameIdentifiers":[{"affiliationNameIdentifier":"","affiliationNameIdentifierScheme":"ISNI","affiliationNameIdentifierURI":"https://www.isni.org/isni/"}],"affiliationNames":[{"affiliationName":"","affiliationNameLang":"ja"}]}],"creatorNames":[{"creatorName":"川村, みどり","creatorNameLang":"ja"},{"creatorName":" Kawamura, Midori","creatorNameLang":"en"}],"familyNames":[{"familyName":"川村","familyNameLang":"ja"},{"familyName":" Kawamura","familyNameLang":"en"}],"givenNames":[{"givenName":"みどり","givenNameLang":"ja"},{"givenName":"Midori","givenNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"44880","nameIdentifierScheme":"WEKO"},{"nameIdentifier":"70261401 ","nameIdentifierScheme":"KAKEN - 研究者検索","nameIdentifierURI":"https://nrid.nii.ac.jp/ja/nrid/1000070261401 "}]},{"creatorNames":[{"creatorName":"柳沢, 英人","creatorNameLang":"ja"}],"nameIdentifiers":[{"nameIdentifier":"37956","nameIdentifierScheme":"WEKO"}]}]},"item_files":{"attribute_name":"ファイル情報","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"2016-11-22"}],"displaytype":"detail","filename":"8663743-3.pdf","filesize":[{"value":"868.4 kB"}],"format":"application/pdf","licensetype":"license_note","mimetype":"application/pdf","url":{"label":"8663743-3.pdf","objectType":"fulltext","url":"https://kitami-it.repo.nii.ac.jp/record/7413/files/8663743-3.pdf"},"version_id":"562436e3-cefd-42e7-945c-bc9fe7062cd8"}]},"item_keyword":{"attribute_name":"キーワード","attribute_value_mlt":[{"subitem_subject":"弁金属","subitem_subject_language":"ja","subitem_subject_scheme":"Other"},{"subitem_subject":"Al3Zr金属間化合物膜","subitem_subject_language":"ja","subitem_subject_scheme":"Other"},{"subitem_subject":"Al3Zr陽極酸化膜キャパシタ","subitem_subject_language":"ja","subitem_subject_scheme":"Other"},{"subitem_subject":"高信頼性","subitem_subject_language":"ja","subitem_subject_scheme":"Other"},{"subitem_subject":"耐熱性","subitem_subject_language":"ja","subitem_subject_scheme":"Other"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"jpn"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"journal article","resourceuri":"http://purl.org/coar/resource_type/c_6501"}]},"item_title":"Al3Zr金属間化合物の陽極酸化膜とそれを応用した高信頼性薄膜キャパシタの作製","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"Al3Zr金属間化合物の陽極酸化膜とそれを応用した高信頼性薄膜キャパシタの作製","subitem_title_language":"ja"},{"subitem_title":"Anodization of Al3Zr Intermetallic Compound Film and Its Application to the Preparation of Thin Film Capacitor with High Reliability","subitem_title_language":"en"}]},"item_type_id":"3","owner":"188","path":["86"],"pubdate":{"attribute_name":"PubDate","attribute_value":"2010-02-26"},"publish_date":"2010-02-26","publish_status":"0","recid":"7413","relation_version_is_last":true,"title":["Al3Zr金属間化合物の陽極酸化膜とそれを応用した高信頼性薄膜キャパシタの作製"],"weko_creator_id":"188","weko_shared_id":-1},"updated":"2025-11-14T05:01:35.059168+00:00"}