@article{oai:kitami-it.repo.nii.ac.jp:00007070, author = {J., Yan and K., Syoji and J., Tamaki}, issue = {7-12}, month = {Aug}, pages = {1380--1387}, title = {Some Observations on the Wear of Diamond Tools in Ultra-precision Cutting of Single-Crystal Silicon}, volume = {255}, year = {2003} }