@article{oai:kitami-it.repo.nii.ac.jp:00007012,
 author = {H., Suzuki and Y., Miwa and T., Ohno and M., Fujimoto},
 month = {Jan},
 pages = {269--272},
 title = {Chemical solution deposition of PZT/oxide electrode thin film capacitprs with preferred orientation of Si substrate},
 volume = {301},
 year = {2006}
}