@article{oai:kitami-it.repo.nii.ac.jp:00006973,
 author = {J., Mistrik and K., Takahashi and R., Antos and M., Aoyama and T., Yamaguchi and Y., Anma and Y., Fukuda and M., B. Takeyama and A., Noya and Z.-T., Jiang and S., M. Thurgate and G., V. Riessen},
 month = {May},
 pages = {473--477},
 title = {Spectroscopic ellipsometry of TaN_x and VN films},
 volume = {455-456},
 year = {2004}
}