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The Resistive and Structural Properties of Evaporated Chromium and Chromium - Copper Alloy Thin Films
https://kitami-it.repo.nii.ac.jp/records/6499
https://kitami-it.repo.nii.ac.jp/records/6499865ff962-c562-4f5b-a8d6-45cc9c9b2789
| 名前 / ファイル | ライセンス | アクション |
|---|---|---|
12-1-6.pdf (3.4 MB)
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| Item type | 紀要論文 / Departmental Bulletin Paper(1) | |||||
|---|---|---|---|---|---|---|
| 公開日 | 2007-04-09 | |||||
| タイトル | ||||||
| タイトル | The Resistive and Structural Properties of Evaporated Chromium and Chromium - Copper Alloy Thin Films | |||||
| 言語 | en | |||||
| 言語 | ||||||
| 言語 | eng | |||||
| 資源タイプ | ||||||
| 資源 | http://purl.org/coar/resource_type/c_6501 | |||||
| タイプ | departmental bulletin paper | |||||
| 著者 |
Toshiji, UMEZAWA
× Toshiji, UMEZAWA× Hideko, YAHATA |
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| 抄録 | ||||||
| 内容記述タイプ | Abstract | |||||
| 内容記述 | The resistive and structural properties of chromium and chromium-copper alloy films were found to vary significantly with changes in substrate temperature and deposition rate, and with heat treatment. Properties such as resistance, temperature coefficient of resistance, and Hall coefficient differ considerably from the corrected bulk values. From an investigation of the structural properties of films, it was found that the lattice constants of the as-deposited chromium and copper films were somewhat smaller than the ASTM value. Heat treatment in air at 200℃ for 3 hrs has improved the resistive properties as determined on 500 Å thick films containing a copper content lower than 60 wt. ％. | |||||
| 言語 | en | |||||
| bibliographic_information |
ja : 北見工業大学研究報告 巻 12, 号 1, p. 59-66, 発行日 1981-01 |
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| フォーマット | ||||||
| 内容記述タイプ | Other | |||||
| 内容記述 | application/pdf | |||||
| item_2_select_15 | ||||||
| 言語 | en | |||||
| 値 | publisher | |||||
| 出版者 | ||||||
| 出版者 | 北見工業大学 | |||||
| 言語 | ja | |||||
