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  1. 紀要掲載論文
  2. 北見工業大学研究報告
  3. Vol.12

The Resistive and Structural Properties of Evaporated Chromium and Chromium?Copper Alloy Thin Films*

https://kitami-it.repo.nii.ac.jp/records/6499
865ff962-c562-4f5b-a8d6-45cc9c9b2789
名前 / ファイル ライセンス アクション
12-1-6.pdf 12-1-6.pdf (3.4 MB)
Item type 紀要論文 / Departmental Bulletin Paper(1)
公開日 2007-04-09
タイトル
タイトル The Resistive and Structural Properties of Evaporated Chromium and Chromium?Copper Alloy Thin Films*
言語
言語 eng
資源タイプ
資源 http://purl.org/coar/resource_type/c_6501
タイプ departmental bulletin paper
著者 Toshiji, UMEZAWA

× Toshiji, UMEZAWA

WEKO 32837

Toshiji, UMEZAWA

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Hideko, YAHATA

× Hideko, YAHATA

WEKO 32838

Hideko, YAHATA

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抄録
内容記述タイプ Abstract
内容記述 The resistive and structural properties of chromium and chromium-copper alloy films were found to vary significantly with changes in substrate temperature and deposition rate, and with heat treatment. Properties such as resistance, temperature coefficient of resistance, and Hall coefficient differ considerably from the corrected bulk values. From an investigation of the structural properties of films, it was found that the lattice constants of the as-deposited chromium and copper films were somewhat smaller than the ASTM value. Heat treatment in air at 200℃ for 3 hrs has improved the resistive properties as determined on 500 Å thick films containing a copper content lower than 60 wt. %.
書誌情報 北見工業大学研究報告

巻 12, 号 1, p. 59-66, 発行日 1981-01
フォーマット
内容記述タイプ Other
内容記述 application/pdf
著者版フラグ
値 publisher
出版者
出版者 北見工業大学
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