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  1. 紀要掲載論文
  2. 北見工業大学研究報告
  3. Vol.10

複合ターゲット法によるTi-Al合金薄膜の電気的特性と膜構造*

https://kitami-it.repo.nii.ac.jp/records/6462
e98b7cd0-f804-436c-995a-f6cc19b304e5
名前 / ファイル ライセンス アクション
10-1-12.pdf 10-1-12.pdf (4.4 MB)
Item type 紀要論文 / Departmental Bulletin Paper(1)
公開日 2007-04-09
タイトル
タイトル 複合ターゲット法によるTi-Al合金薄膜の電気的特性と膜構造*
言語
言語 jpn
資源タイプ
資源 http://purl.org/coar/resource_type/c_6501
タイプ departmental bulletin paper
その他のタイトル
その他のタイトル Electrical Properties and Structures of TiAl Alloy Thin Films Prepared by Sputtering from Composite Targets
著者 八幡, 英子

× 八幡, 英子

WEKO 32686

八幡, 英子

Search repository
梅沢, 利二

× 梅沢, 利二

WEKO 32687

梅沢, 利二

Search repository
著者別名
識別子
識別子 32688
識別子Scheme WEKO
姓名
姓名 Hideko, YAHATA
著者別名
識別子
識別子 32689
識別子Scheme WEKO
姓名
姓名 Toshiji, UMEZAWA
抄録
内容記述タイプ Abstract
内容記述 Ti-Al alloy films were deposited on glass substratesby D.C. sputtering from the Ti-Al composite targets, which have the various aluminium area ratios to obtain different film compositions. Resistivity, temperature coefficient of resistance (TCR), Hall coefficient and structures of films deposited at the different substrate temperatures have bden investigated. The values of resistivity, TCR and Hall coefficient varied with the Al weight % in the films and the substrate temperatures. Their curves plotted as a function of the Al weight % indicated the same tendency even if the films were deposited at different temperatures. However, the influence of the substrate temperature on the signs of the TCR and Hall coefficient was evidently observed in the films with the aluminium weight of 65%. The films sputtered from the composite targets with the aluminium area ratios 49% on the substrate at 200℃ and 400℃ have the resistivity of about 260 μΩ-cm and TCR of -130 ppm/℃. These have suitablecharacteristics as a resistor for practical use. The structures of deposited films have been investigated by X-ray and electron transmiting diffraction analysis, and some information, which was available for the interpretation of the electrical properties of the alloy films.
書誌情報 北見工業大学研究報告

巻 10, 号 1, p. 113-122, 発行日 1978-11
フォーマット
内容記述タイプ Other
内容記述 application/pdf
著者版フラグ
値 publisher
出版者
出版者 北見工業大学
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