{"created":"2021-03-01T05:58:49.569394+00:00","id":6392,"links":{},"metadata":{"_buckets":{"deposit":"f02b012d-bacf-4e6f-a09a-6766a6300a97"},"_deposit":{"id":"6392","owners":[],"pid":{"revision_id":0,"type":"depid","value":"6392"},"status":"published"},"_oai":{"id":"oai:kitami-it.repo.nii.ac.jp:00006392","sets":["7:15:23"]},"item_2_alternative_title_18":{"attribute_name":"その他のタイトル","attribute_value_mlt":[{"subitem_alternative_title":"Electrical Properties of Ti-Si0_2 Cermet Thin Films : Prepared by R. F. Plasma Sputtering"}]},"item_2_biblio_info_6":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"1976-06","bibliographicIssueDateType":"Issued"},"bibliographicIssueNumber":"2","bibliographicPageEnd":"288","bibliographicPageStart":"275","bibliographicVolumeNumber":"7","bibliographic_titles":[{"bibliographic_title":"北見工業大学研究報告"}]}]},"item_2_description_14":{"attribute_name":"フォーマット","attribute_value_mlt":[{"subitem_description":"application/pdf","subitem_description_type":"Other"}]},"item_2_description_4":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"Ti-SiO_2 cermet thin films were deposited onto a glass substrate by R. F. sputtering from a Ti-SiO_2 composite target， on which the SiO_2 area ratio was varied to obtain different compositions.　　　The cermet thin　films sputtered from the target composed of 16％ SiO_2-84％ Tiarea ratios showed a resistivity of 220±10μΩ-cm and a temperature coefficient of nearly zero　　　The thin films sputtered from the target given a greater SiO_2 area ratio than 16％ showed negative temperature coefficient of resistance (TCR), and those from the target given a smaller SiO_2 area ratio showed positive TCR values.　　　The study on the electrical conduction in these cermet thin　films suggested that the mechanism by a capillary model was dominant for the films with positive TCRs and the mechanism by a thermally agitated hopping process was predominant for the films with negative TCRs.","subitem_description_type":"Abstract"}]},"item_2_full_name_3":{"attribute_name":"著者別名","attribute_value_mlt":[{"nameIdentifiers":[{"nameIdentifier":"32419","nameIdentifierScheme":"WEKO"}],"names":[{"name":"UMEZAWA, Toshiji"}]},{"nameIdentifiers":[{"nameIdentifier":"32420","nameIdentifierScheme":"WEKO"}],"names":[{"name":"IGAKI, Seigo"}]}]},"item_2_publisher_32":{"attribute_name":"出版者","attribute_value_mlt":[{"subitem_publisher":"北見工業大学"}]},"item_2_select_15":{"attribute_name":"著者版フラグ","attribute_value_mlt":[{"subitem_select_item":"publisher"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"梅沢, 利二"}],"nameIdentifiers":[{"nameIdentifier":"32417","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"井垣, 誠吾"}],"nameIdentifiers":[{"nameIdentifier":"32418","nameIdentifierScheme":"WEKO"}]}]},"item_files":{"attribute_name":"ファイル情報","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"2016-11-22"}],"displaytype":"detail","filename":"7-2-3.pdf","filesize":[{"value":"5.5 MB"}],"format":"application/pdf","licensetype":"license_note","mimetype":"application/pdf","url":{"label":"7-2-3.pdf","url":"https://kitami-it.repo.nii.ac.jp/record/6392/files/7-2-3.pdf"},"version_id":"efd8ef48-b94f-4f72-bdc9-cbccb1983a49"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"jpn"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"departmental bulletin paper","resourceuri":"http://purl.org/coar/resource_type/c_6501"}]},"item_title":"高周波四極スパッタリングによるTi-SiO_2系 : サーメット薄膜の電気的特性","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"高周波四極スパッタリングによるTi-SiO_2系 : サーメット薄膜の電気的特性"}]},"item_type_id":"2","owner":"1","path":["23"],"pubdate":{"attribute_name":"公開日","attribute_value":"2007-04-09"},"publish_date":"2007-04-09","publish_status":"0","recid":"6392","relation_version_is_last":true,"title":["高周波四極スパッタリングによるTi-SiO_2系 : サーメット薄膜の電気的特性"],"weko_creator_id":"1","weko_shared_id":3},"updated":"2022-12-13T02:19:44.992111+00:00"}