2024-03-28T19:58:43Z
https://kitami-it.repo.nii.ac.jp/oai
oai:kitami-it.repo.nii.ac.jp:00008258
2022-12-13T02:21:50Z
1:87
Low-temperature fabrication of fine structures on glass using electrical nanoimprint and chemical etching
Ikutame, Naoki
Kawaguchi, Keiga
Ikeda, Hiroshi
Sakai, Daisuke
Harada, Kenji
Funatsu, Shiro
Nishii, Junji
Periodic structures were imprinted on a soda lime glass surface below its glass transition temperature (T g) using a carbon-coated SiO2 mold under application of DC voltage. The structure height increased with the applied DC voltage, although no significant increase with pressure was found. At a temperature around T g, the height reached saturation. Chemical etching using 55% KOH solution at 70?°C increased the structure height to eight times the height before etching. Noticeable alternating depression patterns and rapid chemical etching are closely related with the selective decrease in sodium concentration, which occurred only in the surface areas that were pressurized by the mold.
journal article
American Institute of Physics (AIP)
2013-08
application/pdf
J. Appl. Phys.
083514
114
https://kitami-it.repo.nii.ac.jp/record/8258/files/2出版社版.pdf
eng
https://doi.org/10.1063/1.4819321
c 2013 AIP Publishing LLC
open access