2024-03-28T08:53:56Z
https://kitami-it.repo.nii.ac.jp/oai
oai:kitami-it.repo.nii.ac.jp:00007085
2022-12-13T02:25:00Z
1
Epitaxial growth of (111)ZrN thin films on (111)Si substrate by reactive sputtering and their surface morphologies
H., Yanagisawa
S., Shinkai
K., Sasaki
J., Sakurai
Y., Abe
A., Sakai
S., Zaima
journal article
Elsevier
2006-12
1
297
80
86
eng
http://doi.org/10.1016/j.jcrysgro.2006.09.013
metadata only access