2024-03-29T14:44:05Z
https://kitami-it.repo.nii.ac.jp/oai
oai:kitami-it.repo.nii.ac.jp:00008474
2022-12-13T02:21:59Z
1:87
Effect of Heat Treatment on Ion Conductivity of Hydrated ZrO2 Thin Films Prepared by Reactive Sputtering Using H2O Gas
Li, Ning
Abe, Yoshio
Kawamura, Midori
Sasaki, Katsutaka
Itoh, Hidenobu
Suzuki, Tsutomu
open access
c 2011 The Japan Society of Applied Physics
Hydrated ZrO2 thin films were prepared by reactive sputtering using H2O gas, and these films were heat treated in air at temperatures from 100 to 350 °C. Absorbance peaks due to hydrogen-bonded OH groups for these samples were observed by Fourier transform infrared spectroscopy. The peak intensities were nearly the same before and after heat treatment below 200 °C, but began to decrease at 250 °C, and the absorption peak disappeared at 350 °C. Ion conductivity of the films was evaluated by AC impedance measurements and was found to be about 3 ×10-6 S/m before and after heat treatment at 200 °C; it also decreased after heat treatment above 250 °C. From these results, we considered that protons of OH and/or H2O in the films are the dominant ionic species that contribute to the ion conductivity of the films.
The Japan Society of Applied Physics
2011
eng
journal article
AM
https://kitami-it.repo.nii.ac.jp/records/8474
Japanese Journal of Applied Physics
50
4R
045804
https://kitami-it.repo.nii.ac.jp/record/8474/files/No_39_JJAP_50_045804.pdf
application/pdf
1.9 MB
2017-01-12