2024-03-29T07:23:06Z
https://kitami-it.repo.nii.ac.jp/oai
oai:kitami-it.repo.nii.ac.jp:00008470
2022-12-13T02:21:58Z
1:87
Formation of hydrated yttrium oxide and titanium oxide thin films by reactive sputtering in H2O atmosphere and their electrical properties
Abe, Yoshio
Li, Ning
Nishimoto, Kosuke
Kawamura, Midori
Kim, Kyung Ho
Suzuki, Tsutomu
c 2014 The Japan Society of Applied Physics
Hydrated yttrium oxide and titanium oxide thin films were prepared by reactive sputtering in H2O atmosphere at substrate temperatures from −30 to +130 °C. The electrical conductivities of the yttrium oxide films increased with decreasing substrate temperature. The increase in electrical conductivity corresponds well to the increase in IR absorption intensity due to OH bonds, and it is considered that proton conduction is dominant in the yttrium oxide films. In contrast, the conductivity of the titanium oxide films increased with increasing substrate temperature, suggesting that electron conduction is dominant in the films.
The Japan Society of Applied Physics
2014
eng
journal article
AM
https://kitami-it.repo.nii.ac.jp/records/8470
Japanese Journal of Applied Physics
53
6
068002
https://kitami-it.repo.nii.ac.jp/record/8470/files/No_17_JJAP_53_068002.pdf
application/pdf
1.3 MB
2017-01-12