2024-03-28T23:37:41Z
https://kitami-it.repo.nii.ac.jp/oai
oai:kitami-it.repo.nii.ac.jp:00007070
2022-12-13T02:24:54Z
1
Some Observations on the Wear of Diamond Tools in Ultra-precision Cutting of Single-Crystal Silicon
J., Yan
K., Syoji
J., Tamaki
metadata only access
Elsevier
2003-08
eng
journal article
https://kitami-it.repo.nii.ac.jp/records/7070
http://doi.org/10.1016/S0043-1648(03)00076-0
255
7-12
1380
1387