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Effects of substrate temperature on structure and mechanical properties of sputter deposited fluorocarbon thin films
https://kitami-it.repo.nii.ac.jp/records/8469
https://kitami-it.repo.nii.ac.jp/records/8469767ce7ae-602d-4762-be2a-6ba162a5511e
名前 / ファイル | ライセンス | アクション |
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No_8_Vacuum_87_218.pdf (2.2 MB)
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Item type | 学術雑誌論文 / Journal Article(1) | |||||
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公開日 | 2016-09-08 | |||||
タイトル | ||||||
言語 | en | |||||
タイトル | Effects of substrate temperature on structure and mechanical properties of sputter deposited fluorocarbon thin films | |||||
言語 | ||||||
言語 | eng | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | Rf sputtering | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | Thin film | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | PTFE | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | Fluorocarbon | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | Adhesion strength | |||||
資源タイプ | ||||||
資源 | http://purl.org/coar/resource_type/c_6501 | |||||
タイプ | journal article | |||||
アクセス権 | ||||||
アクセス権 | open access | |||||
アクセス権URI | http://purl.org/coar/access_right/c_abf2 | |||||
著者 |
Suzuki, Yuta
× Suzuki, Yuta× Fu, Haojie× Abe, Yoshio× Kawamura, Midori |
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著者別名 | ||||||
姓名 | 阿部, 良夫 | |||||
言語 | ja | |||||
著者別名 | ||||||
姓名 | 川村, みどり | |||||
言語 | ja | |||||
抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | Fluorocarbon thin films were formed by radio-frequency magnetron sputtering using a polytetrafluoroethylene target with different substrate temperatures in the range −5 to 200 °C. Using X-ray diffraction and Fourier transform infrared spectroscopy, it was confirmed that the films were amorphous and contained C–F bonds. X-ray photoelectron spectroscopy measurements indicated that the amount of cross-linking in the films increased with increasing substrate temperature. Corresponding to the change in the molecular structure, the adhesion strength of the films to the Si substrate, estimated by micro-scratch testing, improved with increasing substrate temperature. | |||||
書誌情報 |
en : Vacuum 巻 87, p. 218-221, 発行日 2013-01 |
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DOI | ||||||
識別子タイプ | DOI | |||||
関連識別子 | https://doi.org/10.1016/j.vacuum.2012.05.029 | |||||
権利 | ||||||
権利情報 | c 2012 Elsevier | |||||
出版者 | ||||||
出版者 | Elsevier | |||||
著者版フラグ | ||||||
値 | author | |||||
出版タイプ | ||||||
出版タイプ | AM | |||||
出版タイプResource | http://purl.org/coar/version/c_ab4af688f83e57aa |